太阳能电池片上生长ZnO/Al薄膜电极的研究  

Study on ZnO/Al electrochemical films on solar cells

作　　者：张东[1] 鞠振河[1] 王晓文[1] 赵琰[1] 宋世巍[1] 李昱材[1] 王刚[1] 丁艳波[1] 王晗[1] 王健[1] 高微[1] 

机构地区：[1]沈阳工程学院新能源学院,沈阳110136

出　　处：《沈阳师范大学学报（自然科学版）》2015年第3期329-332,共4页Journal of Shenyang Normal University:Natural Science Edition

基　　金：教育部重点实验室项目(LABKF1406)

摘　　要：太阳能电池片上生长ZnO/Al薄膜电极的研究属于新型透明导电材料领域,具体涉及一种在未引入电极的太阳能电池片上制备ZnO/Al薄膜的方法。以未引入电极的太阳能电池片为基片,清洗后送入磁控溅射反应室,以纯Al为靶材进行磁控溅射得到20~300nm厚的Al薄膜,然后将基片置于气相沉积室内同时通入氧气和携带有Zn（CH2CH3）2的氩气,沉积得到50~600nm厚的ZnO薄膜,最后在氧气气氛下,于400~600℃对载有ZnO和Al薄膜的基片退火处理,得到ZnO/Al薄膜。制备工艺简单,沉积过程易于控制,透明导电薄膜的均匀性好,光电性能优异,以此作为太阳能电池的背电极,替代传统的铝金属电极,进一步提高了太阳能电池的转化效率。The study is concerned with new type of transparent conductive materials in the field,particularly relates to a method for preparing the introduction of electrodes on a non-film solar cells ZnO/Al films.This method is based on research papers not introduced electrode film solar cells as a substrate,magnetron sputtering after cleaning into the reaction chamber to be pure Al as a target magnetron sputtering get 20~300nm thick Al film,and then the substrate is placed into the vapor deposition chamber while passing an oxygen carrying and Zn（CH2CH3）2,argon,is deposited to give a thickness of 50~600nm ZnO film,and finally in an oxygen atmosphere at 400~600 ℃ for containing ZnO and Al annealing the substrate film to obtain a ZnO/Al film.Preparation of this research paper is simple,easy to control the deposition process,the transparent conductive film uniformity and excellent optical performance,as the back electrode of the solar cell,which can replace the traditional aluminum metal electrode,and further improve the conversion efficiency of solar cells.

关 键 词：太阳能电池片 ZnO/Al薄膜电极 磁控溅射 

分 类 号：TN304.55[电子电信—物理电子学]