基于紫外厚胶的微悬臂结构设计与加工  

The Design and Manufacture of Micro Cantilever Based on Thick Photoresist

作　　者：赵龙[1] 张斌珍[1] 段俊萍[1] 崔建利[1] 

机构地区：[1]电子测试技术重点实验室(中北大学),太原030051

出　　处：《科学技术与工程》2015年第30期128-131,共4页Science Technology and Engineering

基　　金：国家自然科学基金(61401405);(51475438);山西省基础研究项目(2014011021-4);新世纪优秀人才支持计划(130951862)资助

摘　　要：研究了一种以SU-8光刻胶为结构材料的微悬臂结构。通过控制紫外光刻过程中的曝光剂量,仅仅使光刻胶的上部分发生交联,下部分的光照强度不足以发生交联反应,制作了厚度从149μm到345μm不等的微悬臂结构,并通过分析得出了悬臂厚度与曝光剂量的关系式。结果显示,采用该方法所制作的悬臂结构具有质量轻、价格便宜、操作灵活性大等特点,为制作出复杂的三维空间悬臂结构奠定了基础。与传统以硅或金属材料为基础的微悬臂相比,能够更好地适应目前微型传感器的发展趋势,具有非常广阔的发展空间。A new method for fast fabrication of micro cantilever structure with SU-8 photoresist is reported. The thickness range from 149 μm to 345 μm of cantilever structure was obtained by controlling the exposure dose in the process of UV light carved,which makes crosslinking on the part of the photoresist,the part of the light intensity is not enough to produce crosslinking reaction. The relation between the thickness of the cantilever and exposure dose was then get through the analysis. Experimental results showed that the cantilever structure made by this method not only has the advantage of light quality,the price is cheap,flexible operation etc.,but laid a foundation to produce complex three-dimensional space cantilever structure. With traditional micro cantilever based on silicon or metal materials compared,it can better adapt to the trend of the development of micro sensor and have a broad space for development.

关 键 词：微悬臂梁 曝光剂量 SU-8 交联反应 紫外光刻 

分 类 号：TH706[机械工程—仪器科学与技术]