Cu靶功率和衬底温度对Cu-SiO_2纳米复合膜的相结构与光吸收性能影响  

Effects of Cu Target Power and Substrate Temperature on Phase Structure and Optical Absorption Properties of Cu-SiO_2 Nano-Composite Films

作　　者：赵志明[1] 邢少敏[1] 张国君[1] 白力静[1] 

机构地区：[1]西安理工大学,陕西西安710048

出　　处：《稀有金属材料与工程》2015年第10期2539-2543,共5页Rare Metal Materials and Engineering

基　　金：陕西省自然科学基金(2010JQ6008);国家自然科学基金(51202191;51171148);陕西省重点学科建设专项资金

摘　　要：实验利用直流和射频磁控溅射方法交替沉积Cu-SiO2纳米复合膜,研究不同Cu靶功率和衬底温度对纳米复合膜的相结构和光吸收性能的影响。结果表明:随着Cu靶功率的增加,金属Cu纳米颗粒尺寸增大,导致光吸收峰峰位发生红移;随着衬底温度的升高,由于Cu再蒸发效应致使金属Cu纳米颗粒尺寸减小,引起光吸收峰峰位发生蓝移;与室温下沉积态Cu-SiO2纳米复合膜相比,在衬底加热条件下沉积的纳米复合膜在可见光波段出现了明显的表面等离子体共振吸收峰。因此,Cu靶功率和衬底温度对Cu-SiO2纳米复合薄膜的结晶状况和光吸收性能有显著影响。The Cu-SiO2 nano-composite thin films with different Cu target powers and substrate temperatures were prepared by DC and RF magnetron sputtering in an alternating deposition method. The phase structure and optical absorption properties of Cu-SiO2 nano-composite films were studied. The results indicate that with the increase of the Cu target power, the size of the Cu nanoparticles increases, and the peak in the optical absorption spectra presents a red-shift. Due to the re-evaporation effect, the size of Cu nanoparticles decreases and the peak exhibits a blue-shift with increasing of the substrate temperature. Compared with the films deposited at RT, the films at different substrate temperatures display a clear surface plasmon resonance absorption peak in the visible band. Therefore, the Cu target power and the substrate temperature significantly influence the crystallization states and optical absorption properties of the Cu-SiO2 nano-composite films.

关 键 词：Cu-SiO2纳米复合膜 磁控溅射 相结构 光吸收性能 

分 类 号：TB34[一般工业技术—材料科学与工程]