脉冲偏压对304不锈钢表面多弧离子镀CrAlN薄膜结构和耐蚀性能的影响  

Effects of Pulsed Bias on Microstructure and Corrosion Resistance of CrAlN Film on 304 Stainless Steel Prepared by Arc Ion Plating

作　　者：任鑫[1] 孔令梅[1] 

机构地区：[1]辽宁工程技术大学材料科学与工程学院,辽宁阜新123000

出　　处：《材料保护》2015年第10期54-57,9,共4页Materials Protection

摘　　要：目前,鲜见有关脉冲偏压对多弧离子镀Cr Al N薄膜耐蚀性能影响的报道。以不同的脉冲偏压在304不锈钢表面多弧离子镀Cr Al N薄膜。采用扫描电镜、显微镜、X射线衍射仪、硬度仪、粗糙度仪分析了Cr Al N薄膜的表面形貌、相结构、硬度、表面粗糙度及耐蚀性能,分析了脉冲偏压对相关性能的影响。结果表明:随着脉冲偏压幅值的增大,Cr Al N薄膜表面大颗粒及凹坑尺寸和数量减少,薄膜质量提高;Cr Al N薄膜主要由(Cr,Al)N相组成,随着偏压增加,Cr Al N薄膜出现(220)择优取向;Cr Al N薄膜表面粗糙度随脉冲偏压增大而减小,显微硬度随脉冲偏压的增大而增大;Cr Al N薄膜在3.5%Na Cl溶液中的耐蚀性随着脉冲偏压的增大而增大,脉冲偏压为400 V时,Cr Al N薄膜与基体304不锈钢的腐蚀速率之比为0.34,薄膜的综合性能最好。CrAlN films were deposited by pulsed bias arc ion plating under different pulsed bias.Morphologies,phase structures,hardness,roughness and corrosion resistance of the films were analyzed by SEM,microscope,XRD,hardness tester and roughness gauge.Results showed that the size and quantity of macroparticles and pits on the surface were decreased with the increase of pulsed bias,indicating that the quality of CrAIN film was improved gradually.The film was mainly composed of(Cr,Al) N,and a(220) preferred orientation emerged with the increase of the pulsed bias.Increasing the pulsed bias,the surface roughness was decreased while the hardness was improved.In the solution of 3.5%NaCl,the corrosion resistance of CrAIN films was enhanced with the increase of the pulsed bias.When the pulsed bias was 400 V,the ratio of the relative corrosive rate of the film and the substrate was0.34 and the film presented the best overall performance.

关 键 词：CrAlN薄膜 多弧离子镀 脉冲偏压 相结构 耐蚀性 

分 类 号：TG174.44[金属学及工艺—金属表面处理]