Al_2O_3/GaSb p-MOSFET器件电学性质模拟（英文）  

Simulation of the electrical properties of Al_2O_3/GaSb p-MOSFET

作　　者：甘凯仙 王林[2] 邢怀中[1] 

机构地区：[1]东华大学理学院应用物理系,上海201620 [2]中国科学院上海技术物理研究所红外物理国家重点实验室,上海200083

出　　处：《红外与毫米波学报》2015年第5期528-532,共5页Journal of Infrared and Millimeter Waves

基　　金：Supported by National Natural Science Foundation of China(NSFC)(11174048,61376102)

摘　　要：利用泊松方程和连续性方程对Al2O3/GaSb p-MOSFET进行二维数值分析,研究其在高场和载流子速度饱和下的电学特性以及漏极电流的开关电流比.与实验研究相对比,沟道长度为0.75μm的GaSb p-MOS器件获得漏极电流最大为61.2mA/mm.改变沟道长度和GaS b衬底的掺杂浓度,由于高k介质栅电容效应和低阈值电压,漏极电流变化不大.在理想条件下,该器件获得超过三个数量级的漏极开关电流比以及较低的夹断漏电流(10-15A/μm).结果表明,基于高k介质的GaSb MOSFET是III-V族p沟道器件良好的候选材料.To study the high-field electrical property and the drain current Ion/ Ioffratio of Al2O3/ GaSb p-M OSFET,the Poisson and continuity equations w ith carrier velocity saturation w ere solved consistently w ith tw o-dimensional numerical analysis. The simulation results show that a maximum drain current of 61. 2 m A / mm has been reached for 0. 75-μm-gate-length GaSb p-M OSFET device. The results have been compared w ith that of experiment. With change of the channel length and doping-level in substrate GaSb,the drain currents exhibit little change due to the effects of gate capacitance w ith high-k dielectric and low-threshold voltage. In addition,a high Ion/ Ioffratio w ith more than three orders of magnitude and relatively low pinch-off leakage current Ioffw ith 10-15 A / μm are predicted in an ideal condition. The results indicate that GaSb-based M OSFET w ith high-k dielectric is promising for future p-channel III-V device.

关 键 词：Al2O3/GaSb p型场效应晶体管 饱和电流 泊松方程与连续性方程 开关电流比 

分 类 号：O472.4[理学—半导体物理]