一种用于胎压监测的MEMS压力传感器设计  

Design of MEMS pressure sensor available for tire pressure monitoring

作　　者：张鉴[1] 戚昊琛[1] 杨文华[1] 黄正峰[1] 胡智文[2] 

机构地区：[1]合肥工业大学电子科学与应用物理学院,合肥230009 [2]浙江传媒学院新媒体学院,杭州310018

出　　处：《电子测量与仪器学报》2015年第10期1424-1430,共7页Journal of Electronic Measurement and Instrumentation

基　　金：国家自然科学基金(61404042;61574052);合肥工业大学科研究发展基金(J2014HGXJ0091;J2014HGXJ0082)资助项目

摘　　要：无线胎压监测系统是近年来得到高度关注的一种汽车主动安全装置。为对胎压监测系统实现高线性的压力测量,提出了一种球冠形底部固定极板与复合膜可动上极板相结合的电容式MEMS压力传感器。该结构改变了经典的两极板接触过程,并在下极板底部中心设置基于深刻蚀工艺的深孔结构,使传感器几乎完全工作在线性区间。针对汽车胎压的量程,分析了复合膜厚度对极板接触状态及线性度的影响,并利用有限元分析法对结构进行了模拟与验证,最后给出了工艺流程说明。该方案的提出,可为工作于100～800 kPa的汽车胎压监测提供一种新的MEMS传感器实现方式。Wireless tire pressure monitoring system has got highly attention as an automobile active safety device.To realize high linearity pressure measuring,a capacitive MEMS pressure sensor is presented,which is based on a fixed spherical cap bottom electrode and a top electrode formed by multiple membranes.In this device,the touch process of the electrodes starts at the beginning of measuring range,and a structure like a hole is added,which can be manufactured using DRIE fabrication.The novel device can perform a good linearity during the whole measuring range due to the special structure.The analysis of the influence of membrane thickness to touch status and linearity is performed by finite element method,and the novel structure is verified to be effective.Further more,the fabrication process of this device is proposed and introduced.This high-linear MEMS pressure sensor can provide a good choice to tire pressure monitoring system,and it will work in the press range from 100 kPa to 800 kPa,which is the standard press range of common automobiles.

关 键 词：胎压监测 MEMS压力传感器 高线性 接触式 有限元分析 

分 类 号：TN402[电子电信—微电子学与固体电子学]