利用准光腔对辉光放电等离子体诊断分析  

Novel Technique to Diagnose Glow Discharge Plasma with Quasi-Optical Cavity

作　　者：葛萌[1] 张正龙[1] 

机构地区：[1]北京航天计量测试技术研究所,北京100076

出　　处：《真空科学与技术学报》2015年第11期1362-1367,共6页Chinese Journal of Vacuum Science and Technology

摘　　要：利用建立的准光腔谐振系统对辉光放电空气等离子体中电子密度参数进行了诊断分析。通过测试加载等离子体前后准光腔谐振系统的谐振参数,计算得到被测等离子体的等效复介电常数及电子密度。实验结果表明:采用准光腔诊断辉光放电空气等离子体,测试结果重复性好;当工作气压在30~35 Pa,放电电流在2~8 A时,等离子体密度范围在10^(16)m^(-3)量级,且在相同气压下,电子密度随放电功率增加而增加;与采用标准Langmuir探针的诊断结果相比较,二者差别不大。证明了采用准光腔谐振系统诊断辉光放电等离子体的可靠性与准确性。A novel technique was developed to diagnose glow discharge air plasmain real timewith a lab-built quasi- optical resonant cavity. The influence of the measurement conditions, including but not limited to the pressure, discharge current, discharge power and plasma density, on the precision of the electron density and complex dielectric constant was investigated; and the results were compared with those diagnosed with Izmgmuir probe. The results show that the quasi-op- tical cavity does a good job in diagnosis of the air plasma with fairly high precision and reliability. For example, under the conditions ： a pressure in 30 - 35 Pa range, a discharge current in 2 -8 A range, and a plasma density in the order of 1016 m-3,the plasma densities, repeatedly measured with the low-cost quasi-optical cavity, agree fairly well with those diag- nosed by Langmuir probe, with a relative error about 10%. Besides, at a given pressure, the electron density increases with an increase of the discharge power.

关 键 词：准光腔 等离子体密度 辉光放电 LANGMUIR探针 

分 类 号：O536[理学—等离子体物理]