CrON扩散阻挡层对NbCrAl涂层与Nb基高温合金元素互扩散的影响  

Influence of CrON diffusion barrier on elements inter-diffusion between NbCrAl coating and Nb-based superalloy

作　　者：许安[1] 周敏[1] 杨阳[1] 秦泽华[1] 李伟洲[1] 

机构地区：[1]广西大学材料科学与工程学院,南宁530004

出　　处：《航空学报》2015年第11期3734-3741,共8页Acta Aeronautica et Astronautica Sinica

基　　金：国家自然科学基金(51371059;51361003;51001032);广西自然科学基金(2014GXNSFCA118013;0731013);广西自然科学基金创新研究团队项目(2011GXNSFF018001);广西高等学校高水平创新团队项目(第二批)~~

摘　　要：利用磁控溅射技术在C103型Nb基高温合金上制备了含和不含CrON扩散阻挡层的NbCrAl涂层,对比研究了2种涂层分别经900℃和1 000℃真空热处理后的元素扩散行为。结果表明:NbCrAl涂层以Cr2Nb和AlNb2相为主,含非晶态组织;真空热处理后生成了NbAl3和(Nb,Cr)沉淀相。热处理温度由900℃升至1 000℃时,NbCrAl涂层中元素扩散速度加快。不含扩散阻挡层样品中Cr和Al元素扩散至基体的含量分别为2.76wt%和1.21wt%,而含扩散阻挡层样品中Cr和Al元素扩散到基体的含量分别仅为2.52wt%和0.84wt%。扩散阻挡层保持连续,且与涂层及基体的界面结合良好,经高温处理后主要以密排六方结构的Cr2O3和Al2O3相为主,有效地抑制了元素互扩散。NbCrAl coatings with and without CrON diffusion barrier（DB）are prepared on C103Nb-based superalloy by magnetron sputtering technique.The element diffusion behavior of two kinds of the coatings during vacuum heat treatment at 900℃ and 1 000 ℃is investigated.The results indicate that the as-deposited NbCrAl coating is composed of Cr2 Nb and AlNb2 with amorphous phases.After vacuum heat treatment,NbAl3and（Nb,Cr）precipitated phases are formed.When the heat treatment temperature is increased to 1 000℃from 900℃,the rate of diffusion of elements in the NbCrAl coating becomes accelerated.Cr and Al elements in the samples without a DB diffuse to C103 substrate are 2.76wt% and 1.21wt%,while in the samples with a DB are only 2.52wt% and 0.84wt%.CrON diffusion barrier maintains continuous and has good adhesion to the coating and substrate as well.During high-temperature treatment,the CrON diffusion barrier,which is mainly composed of Cr2O3 and Al2O3phases with close-packed hexagonal structure phases,effectively suppresses the elements interdiffusion between the coating and substrate.

关 键 词：磁控溅射技术 涂层 Nb基合金 扩散阻挡层 互扩散 

分 类 号：V252.3[一般工业技术—材料科学与工程] V261.93[航空宇航科学与技术—航空宇航制造工程]