压电陶瓷电机驱动的三维微动定位平台及验证  

Research on a Precision Positioning Stage Based on Piezoelectric Actuators and it's Validation

作　　者：林海波[1] 杨国哲[2] 

机构地区：[1]台州职业技术学院机电工程学院,浙江台州318000 [2]沈阳工业大学机械工程学院,辽宁沈阳110023

出　　处：《压电与声光》2015年第6期1030-1033,共4页Piezoelectrics & Acoustooptics

基　　金：浙江省自然科学基金资助项目(LY14E050001);浙江省2014年高等学校访问学者专业发展基金资助项目(FX2014173);2013年度浙江省高职高专院校专业带头人专业领军基金资助项目(lj2013140)

摘　　要：压电陶瓷电机具有高分辨率和压电驱动装置的动态特性,具有体积小、结构紧凑、成本低、输出力大、响应快、精度高、无电磁干扰等特点,但存在滞后误差、垂向位移误差,行程短的问题,尤其在电极损耗后,补偿量增大,严重影响了定位精度和难以满足三维加工的工作要求。该文通过对压电陶瓷电机驱动的百毫米以上超精密加工三维结构平台的性能研究,采用宏微双驱动协调控制,实现大行程和小步距的有机结合,对微动精密工作台性能进行实验,得到了平台运行的特性曲线。结果表明该机构的动态性和稳态性能良好,实现超低速、响应快、超高分辨率、高精度的双向步进运动,可以达到亚微米至纳米量级的定位精度,满足极微细电火花加工的高精度要求,为进一步研究压电陶瓷电机在超精密运动系统的应用、提高系统的定位精度,提供科学依据。Ultrasonic micro-motor gathers a lot of advantages,such as high resolution,good dynamic performance,small volume,compact structure,low cost,high output force,quickly response,high precision and no electromagnetic interference etc.However,it has some shortcomings,such as vertical displacement,lag error,and small travel,especially those shortcomings have many seriously affection on the positioning accuracy and 3Dprocessing because of increasing compensation after electrode loss.Based on ultra-precision 3Dplatform of piezoelectric motor driver in the paper,its large travel and small step is combined by adopting macroscopic-microcosmic and double-direction drive control system.After testing of micro-precision worktable,the running curves are obtained.Results show it has good dynamic and steady performance,realizing ultra-low speed,fast response,high resolution and high precision of two-way stepping movement.Simultaneously,it has achieved the sub-micrometer to nanometer positioning accuracy and satisfied the positioning accuracy of micro-EDM.The research provides significant scientific reference for further development of piezoelectric motor application in ultra precision motion system position precision of the system.

关 键 词：压电陶瓷电机 微细加工 三维微定位 最小步进 大行程 

分 类 号：TN304.9[电子电信—物理电子学]