RF MEMS并联开关的结构设计及分析  

Structural Design and Analysis of RF MEMS Switches in Parallel

作　　者：许马会 刘凤丽[1,2] 郝永平[1] 

机构地区：[1]沈阳理工大学CAD/CAM技术研究与开发中心,沈阳110159 [2]沈阳理工大学机械工程学院,沈阳110159

出　　处：《四川理工学院学报（自然科学版）》2015年第6期63-67,共5页Journal of Sichuan University of Science & Engineering(Natural Science Edition)

基　　金：国家863项目(2015AA042701)

摘　　要：针对传统的RF MEMS开关的开关速度慢、寿命短、功率处理能力低等缺点,设计了一种新的RF MEMS并联开关结构。这种结构不仅能提高开关速度和开关寿命,还能防止粘附和介质击穿问题。首先介绍了RF MEMS并联开关的结构设计,以及如何根据需要确定合理的尺寸;然后利用Coventor Ware软件对开关进行了静态特性分析和动态特性分析,重点分析了开关的吸合电压;最后利用Saber系统仿真法分析了改变开关的不同结构尺寸对吸合电压的影响。Aiming at the disadvantages of the traditional RF MEMS switch with low switching speed, short life and low power handling capability, a new structure of RF MEMS parallel switch is designed. This structure can not only improve the switching speed and switch life, but also can prevent the adhesion and dielectric breakdown problem. First, the paper intro- duced the structure design of RF MEMS parallel switch, and how to determine the reasonable size according to the need ; then the analysis of static characteristics and dynamic characteristics of switching is analyzed by using CoventorWare software, which focuses on analysis of the switch pull-in voltage. Finally, the effect of different structure size of changing switch on pull-in voltage is analyzed by using the Saber system simulation method.

关 键 词：RF MEMS 并联开关 特性分析 吸合电压 

分 类 号：TM564.6[电气工程—电器]