基于SEM的原位纳米切削实验研究  

Experimental Study on In-Situ Nanometric Cutting Based on SEM

作　　者：刘冰[1,2] 徐宗伟[2] 房丰洲[1,2] 赵兵[2] 

机构地区：[1]天津大学机械工程学院,天津300072 [2]天津大学精密测试技术与仪器国家重点实验室,天津300072

出　　处：《天津大学学报（自然科学与工程技术版）》2015年第11期1035-1040,共6页Journal of Tianjin University：Science and Technology

基　　金：国家重点基础研究发展计划(973计划)资助项目(2011CB706703);国家自然科学基金资助项目(51275559)

摘　　要：利用自主研制的纳米切削装置,对单晶铜材料开展了基于SEM在线观测的原位纳米切削实验.分析了纳米尺度切削深度为10~200,nm时的切屑形态以及材料去除机制.研究了金刚石刀具刃口半径以及切削速度对切屑变形系数的影响.结果表明,随着纳米尺度切削深度的减小,切屑变形系数逐渐增大,且当切削深度小于刀具刃口半径时,切屑变形系数急剧增大.此外,刃口半径和切削速度对切屑变形系数也有着重要的影响.刃口半径越大,切屑变形系数越大,而切削速度越快,切屑变形系数越小.The in-situ nanometric cutting experiments on single crystal copper were carried out with online observation,using a nanometric cutting device under SEM chamber. The chips morphology and removal mechanism of different depths of cut from 10,nm to 200,nm were analyzed. The influences of the tool edge radius and cutting speed on chip deformation coefficient were studied. The results indicate that the chip deformation coefficient increases with the decreases of the depth of cut,especially when the depth of cut less than the tool edge radius. Moreover,the edge radius and cutting speed also have important effects on chip deformation coefficient. The larger the edge radius,the larger the chip deformation coefficient,and the faster the cutting speed,the smaller the chip deformation coefficient.

关 键 词：纳米切削 扫描电子显微镜 切屑 变形系数 刃口半径 

分 类 号：TH122[机械工程—机械设计及理论] TH69