基于MEMS海洋湍流传感器实验研究  

Experiment study of ocean turbulence sensor based on MEMS

作　　者：张严[1] 

机构地区：[1]中国海洋大学电子系,山东青岛266100

出　　处：《现代电子技术》2016年第1期137-139,共3页Modern Electronics Technique

基　　金：国家863项目(2014AA093404)

摘　　要：运用压阻式的基本原理和MEMS技术共同应用于海洋湍流传感器中。首先分析MEMS传感器的基本原理,重点研究了对MEMS传感器性能的实验测试。在风洞实验中,设计有风没风交替作用于传感器和不同风速下作用于传感器的实验;在水下实验中,设计了不同流速下水流作用于传感器的实验。通过实验能够得到MEMS传感器在不同响应下的结果。The piezoresistive fundamental and MEMS technology have been applied in the ocean turbulence sensor. The fundamental of MEMS sensor is analyzed, and the experimental test of the MEMS sensor performance is mainly studied. In the wind tunnel experiments, the experiments that the wind was acted on the sensor alternately and different wind speed was acted on the sensor were designed. In the underwater experiment, the experiment that the different velocity flow was acted on the sensor was designed. The different responding results of the MEMS sensor can be obtained by the experiments.

关 键 词：MEMS 海洋湍流传感器 惠斯通电桥 风洞实验 

分 类 号：TN61-34[电子电信—电路与系统]