二极管型红外焦平面阵列的噪声分析及结构优化设计（英文）  

Noise analysis and structural optimal design of diode microbolometer uncooled IRFPAs

作　　者：朱慧慧[1,2] 冯飞[1] 王跃林[1] 李昕欣[1] 

机构地区：[1]中国科学院上海微系统与信息技术研究所传感技术联合国家重点实验室,上海200050 [2]中国科学院大学,北京100049

出　　处：《红外与毫米波学报》2015年第6期647-653,共7页Journal of Infrared and Millimeter Waves

基　　金：Supported by National Natural Science Foundation of China(61172151,60876081);National High Technology Research and Development Program of China(863 Program)(2009AA04Z317);Science and Technology Commission of Shanghai Municipality,(14DZ1105102)

摘　　要：二极管非制冷红外焦平面阵列(IRFPA)探测器具有广阔的前景,然而它的性能受噪声源的制约,为了得到高性能的探测器,必须研究噪声源并减小其影响.概述了探测器噪声源,量化并研究了不同噪声对探测器的影响,最后得到了二极管IRFPA的性能极限,此外,计算得到了最优的结构参数.理论研究表明温度起伏噪声对应的最小噪声等效温差(NETD)为2.36mK,此时探测器热导为辐射热导,其值为2.06 nW/K.当单元尺寸为25μm×25μm的探测器的正向偏置电流为33μA,占空比为54%时可得到最优NETD为46.5 mK.The diode microbolometer uncooled IRFPAs（ infrared focal plane arrays,IRFPAs） have shown broad prospects in recent years. The performance of the IRFPAs is limited by sources of noise from the detector itself which must be further studied and decreased to achieve better performance. This paper outlines sources of noise from the detector,quantifies the RMS（ root-mean-square,RMS） noise voltages from different noise sources,discusses their implications and finally obtains performance limits of the diode microbolometer IRFPA. Moreover,the optimum structural parameters are also studied. The theoretical computation results show that the temperature fluctuation noise-limited NETD（ noise-equivalent temperature difference,NETD） of the detector is 2. 36 mK with a corresponding radiation-limited conductance of 2. 06 nW/K. In addition,the optimum NETD of 46. 5 mK can be obtained when the detector operates in the forward bias current of 33 μA and the ratio of temperature sensing area is54% in a 25 μm × 25 μm micromachined structure.

关 键 词：非制冷红外焦平面阵列 二极管 噪声等效温差 

分 类 号：TN215[电子电信—物理电子学]