FTIR测量的量子型光电探测器响应光谱校正  

Correction of response spectra of quantum type photodetectors measured by FTIR

作　　者：张永刚[1] 周立[1] 顾溢[1] 马英杰[1] 陈星佑[1] 邵秀梅[2] 龚海梅[2] 方家熊[2] 

机构地区：[1]中国科学院上海微系统与信息技术研究所信息功能材料国家重点实验室,上海200050 [2]中国科学院上海技术物理研究所红外成像材料与器件重点实验室,上海200083

出　　处：《红外与毫米波学报》2015年第6期737-743,共7页Journal of Infrared and Millimeter Waves

基　　金：973(2012CB619200;2014CB643900);国家自然科学基金(61275113;61204133;61405232;61334004)~~

摘　　要：针对采用FTIR方法测量量子型光电探测器的光电流谱并据此校正获得器件的实际响应光谱问题,提出了两种简便可行的校正方案,即计算仪器函数校正方案和标准探测器传递校正方案;对其可行性、限制因素及注意事项进行了详细讨论.用两种方案对多种短波红外InGaAs光电探测器进行了测量校正,获得了与实际符合的响应光谱.为验证方案的适用性,还与采用经精确标定的光栅分光测量系统测得的结果进行了比对,确认了其适用性.结果表明,采用FTIR测量方法并结合适当的校正方案可以获得符合实际的响应光谱.To get actual response spectra of quantum type photodetectors from measured photo-current spectra using FTIR method,two feasible and convenient correction schemes of calculated instrument function scheme and standard detector transfer scheme are proposed. The feasibility,limitations and matters which need attention are discussed in detail. Based on those schemes,consistent response spectra of various shortwave infrared InGaAs photodetectors have been gained. A comparison has been made to the response spectrum measured using a precisely calibrated grating monochromator system and the validity of the schemes is confirmed.

关 键 词：响应光谱 校正 光电探测器 量子型 傅里叶变换红外 

分 类 号：O433.1[机械工程—光学工程]