微机械自跟踪双坐标光电自准直仪的研究  

Study on a two-dimension photoelectric autocollimator with micro-mechanical automatic tracking unit

作　　者：林玉池[1] 洪昕[1] 赵美蓉[1] 

机构地区：[1]天津大学精密测试技术及仪器国家重点实验室,天津300072

出　　处：《光电工程》2002年第4期43-45,共3页Opto-Electronic Engineering

摘　　要：设计一种电磁驱动的微机械结构,实现自准直仪双坐标光电信号的自动跟踪,采用跟踪与读数分离的方法,提高仪器的测量精度。经实际测试和使用表明,设计方案合理,稳定可靠,双坐标工作范围为-100″～ +100″,仪器具有绝对零点,分辨力0.1″, 瞄准定位精度0.1″,非线性误差小于0.5″。An electromagnetic driving micro-mechanical unit is designed and automatic tracking from photoelectric signal of two-dimension autocollimator is realized. The measuring accuracy of the instrument is improved by means of separation tracking from readings. The practical testing and operation show that the design is reasonable and the instrument is reliable. The operating range (stoke) of 2-D coordinate is -110' - +100'. The instrument has an actual zero point and its resolution is 0.1'. Both the pointing and locating accuracy are 0.1' and nonlinear error is less than 0.5'.

关 键 词：微机械 自跟踪 双坐标光电自准直仪 控制系统 瞄准 定位 

分 类 号：TP273[自动化与计算机技术—检测技术与自动化装置]