激光诱导化学液相沉积Fe膜的研究  

Study on laser-induced chemical liquid deposition Fe film

作　　者：侯占杰[1] 唐星[1] 罗穆伟 王振[1] 李运波[1] 朱玉斌[1] 

机构地区：[1]上海大学材料科学与工程学院电子信息系,上海200436

出　　处：《激光技术》2016年第1期136-140,共5页Laser Technology

摘　　要：为了沉积出表面平整、尺寸精确、沉积区域具有可选择性的Fe膜,采用YAG固体激光器,以Fe(CO)5为液相前驱体,利用一定厚度的石英片减少副产物,在激光功率密度为1.0×106W/cm2、激光频率为2.5k Hz、激光扫描速率为300mm/s、激光重复扫描次数为200次的条件下,沉积出表面平整性较好、并且具有一定厚度的Fe沉积层。通过测试分析发现,沉积层表面质量受激光功率密度影响较大;激光功率密度是影响到沉积层能否沉积以及沉积厚度的重要参量。结果表明,通过激光诱导,以Fe(CO)5为前驱体,可以实现铜表面的Fe膜的沉积。To deposit Fe film with smooth surface , accurate dimension , deposition area of optional nature , a YAG solid-state laser was used , Fe （ CO ） 5 was used as liquid precursor and a certain thickness quartz plate was adopted to reduce byproducts.At the condition of laser power density of 1.0 ×106W/cm2, laser frequency of 2.5kHz, laser scanning speed of 300mm/s and scan repetition of 200 times, a Fe layer in a certain thickness was deposited with better surface flatness . Experimental results show that laser power density influences surface quality of deposition layer stronger .Laser power intensity is one of the most important parameters determining whether the layer is deposited or not and the thickness of the layer .The results show that by laser-induced and using Fe （ CO） 5 as precursor , Fe film deposition can be achieved on copper surfaces .

关 键 词：激光技术 化学液相沉积 副产物 激光功率密度 沉积层厚度 Fe(CO)5 

分 类 号：O644.18[理学—物理化学]