65Mn钢表面溅射TiAlN和CrAlN复合膜制备及性能研究  

Investigation of Preparation Technologies and Properties of TiAlN and CrAlN Composite Films on 65Mn Steel Substrate

作　　者：韩士萍[1] 许绍胜 

机构地区：[1]六安职业技术学院机电工程系,安徽六安237158 [2]安徽同步科技有限公司,安徽六安237158

出　　处：《热加工工艺》2015年第24期153-156,共4页Hot Working Technology

摘　　要：采用磁控溅射在65Mn钢基体表面分别制备了不同Al含量（臆40at%）的TiAlN和CrAlN复合膜,研究了Al含量对TiAlN和CrAlN复合膜性能的影响,并对溅射前后摩擦磨损性能进行了对比。采用X射线衍射、扫描电镜、能谱仪（EDS）、纳米硬度仪和高温摩擦磨损试验机,系统分析了Al含量对TiAlN和CrAlN复合膜微结构、力学性能和高温摩擦磨损性能的影响。结果表明,复合膜均为面心立方结构,且呈（111）择优取向生长。随Al含量增加,晶格常数逐渐减小,而硬度逐渐增大。室温下材料的摩擦因数为0.6~0.7,300℃条件下摩擦因数为0.6~0.8,600℃条件下摩擦因数为0.4~0.9;表面溅射Ti0.6Al0.4N和Cr0.62Al0.38N后,其室温耐磨性分别是65Mn钢的1.7倍和2.0倍,300℃下耐磨性分别为65Mn钢的2.7倍和3.0倍,600℃下耐磨性分别为65Mn钢的3.5倍和4.0倍。A series of TiAIN and CrAlN composite films with different Al contents （≤ 40 at%） were deposited on 65Mn steel substrates by RF-reactive magnetron sputtering technique. The effect of AI content on properties of TiAlN and CrAlN composite films was studied. The microstructure, mechanical and tribolobical properties were investigated by XRD, SEM, energy dispersive spectroscopy, nano indentation, high temperature ball-on-disc tribo-meter. The results show that the films share the fcc-CrN structure with a （111） preferential orientation. The lattice constant decreases gradually and the hardness increases with the increase of Al content. The frictiou coefficient is 0.6-0.7 at room temperature, 0.6-0.8 at 300 ℃ and 0.4- 0.9 at 600 ℃, respectively. The wear resistance of TiA1N and CrAlN is 1.7 and 2.0 times of 65Mn steel at room temperature, 2,7 and 3,0 times of 65Mn steel at 300℃ and 3.5 and 4.0 times of 65Mn steel at 600 ℃, respectively.

关 键 词：磁控溅射 TIALN CRALN 摩擦磨损 

分 类 号：TG174.44[金属学及工艺—金属表面处理]