氧化钇稳定氧化锆耐刻蚀涂层的研究现状  

The research of YSZ ceramic coating's preparation techniques on the surface of etching machine process chamber

作　　者：纪箴[1] 王聪瑜[1] 夏洋[2] 贾成厂[1] 张有茶[1] 程诚[1] 黄小泓 

机构地区：[1]北京科技大学材料科学与工程学院,北京100083 [2]中科院微电子所,北京100029

出　　处：《粉末冶金技术》2015年第6期460-464,共5页Powder Metallurgy Technology

摘　　要：随着热喷涂技术的发展,通过制备陶瓷涂层来提高等离子刻蚀机腔室的耐腐蚀性能已成为可能。本文主要论述了氧化钇稳定氧化锆(YSZ)陶瓷涂层及其主要制备技术大气等离子喷涂的工艺过程,介绍了粉末特性及不同喷涂工艺参数对涂层性能的影响作用,为实验研究奠定理论基础。With the development of thermal spray technology,it could have been possible to improve corrosion resistance of the plasma etching chamber by processing ceramic coatings.The yttria-stabilized zirconia ceramic coating and its main preparation techniques such as atmospheric plasma spray process were discussed,the influences of powder characteristics and different process parameters on spray coating performance were presented,thus the theoretical foundation for the experimental study was established.

关 键 词：YSZ涂层 等离子喷涂 涂层性能 

分 类 号：TG174.453[金属学及工艺—金属表面处理]