金刚石带锯切割机的电气控制设计  

Designs for electrical control system of diamond band saw cutting machine

作　　者：胡兴志[1] 孙文博[1] 

机构地区：[1]华北科技学院机电工程学院,北京101601

出　　处：《金刚石与磨料磨具工程》2015年第6期71-75,共5页Diamond & Abrasives Engineering

基　　金：中央高校基本科研业务费资助(3142015023;3142015095;3142015099)

摘　　要：金刚石带锯切割机是半导体晶圆加工前道工序中重要设备,是针对单晶炉提拉成的半导体晶棒进行切断或对晶棒切片进行质量诊断分析而设计的,具有切断和切片功能。在机械设计方面,采用了直线滚动导轨、交流伺服电机驱动、摆动式工作台、随动加紧台等机构,在电气控制系统方面采用了触摸屏、PLC控制、张力实时控制等技术。对金刚石带锯切割机电气进行了设计,主要内容其包括项目介绍、方案论述、传感器的选择、电气控制系统设计、软件设计等。Diamond band saw cutting machine is a key equipment for pre-processing in semiconductor wafer.It is designed to cut the cylinder crystal and diagnose cutting quality.On mechnical design,linear guide adn AC servo motor were used as well as swinging bench and following intensifier.As with electrical system,there applied touch screen,PLC and online tension control.This paper expounds the main content of the diamond band saw cutting machine electrical design,including program introduction,project report,sensor selection,electrical control system design and software design.

关 键 词：金刚石带锯 张力控制 传感器 摆动切割 变速进给 步进电动机 PLC 

分 类 号：TG48[金属学及工艺—焊接] TG74