黑矩阵扩散法修复亮点理论模型及影响因素分析  

Model of BM diffusion method and effect actors analysis in bright dot repair

作　　者：魏平玉 李涛 徐敏 韩磊 郭栋 张南红 

机构地区：[1]合肥鑫晟光电科技有限公司,安徽合肥230012

出　　处：《液晶与显示》2016年第2期164-172,共9页Chinese Journal of Liquid Crystals and Displays

摘　　要：本文建立了黑矩阵扩散法修复亮点的理论模型并实验验证了该模型,分析了影响修复效果的各个因素及影响程度,为提升亮点修复成功率奠定基础。我们设置一系列实验,定性分析了激光泵浦源、激光波长、光斑大小、加工速度、产品设计和修复模式因素对修复效果的影响。首先,通过FIB图像分析,验证了创建的修复理论模型;其次,分析了上述因素对修复成功率的影响,最后对一款修复难度大的产品进行改善提升。实验结果表明：修复过程按照产生空隙（Gap,约1.5μm）,黑矩阵颗粒化和空隙填充三阶段进行;从成功率看,Laser Diode泵浦方式优于Flash Lamp,B波长激光优于A波长激光,光斑大小选取1/2子像素、速度选取100~200μm/s时Gap成功率最高,有Overcoat层（OC）且黑矩阵（BM）比重大的产品修复成功率更高。最后我们以上述理论分析和实验结果为指导,将一款修复难度极大的产品的成功率从40%提升到90%以上。In order to improve bright dot repair success ratio,a model of BM diffusion method was established and improved in experiment.Actors that effect success ratio were analyzed by a serial of experiments,and these actors included laser pumping type,laser wavelength,sport size,repair speed,color filter design,recipe type,etc.First by analyzing FIB image,a repair model was established.Then,repair success ratio in different conditions were calculated.Based on above analysis,success ratio of a hard-repair product was improved.Experimental results indicated that the model of repair process included three steps：Generating Gap（about 1.5μm thick）,making BM into Granule and Gap Filling.By comparing success ratio,following conclusions were obtained：Laser Diode pumping laser was better than flash lamp,B wavelength laser was better than A,Spot size of 1/2sub-pixel and repair speed between 100 ~200μm/s reached better success ratio in Gap repair and product with overcoat and high BM ratio gained higher repair success ratio.Based on repair model and effect actor anal-ysis,success ratio of the hard-repair product increased from 40%to more than 90%.

关 键 词：黑矩阵扩散 修复成功率 激光 影响因素 光阻 

分 类 号：TN24[电子电信—物理电子学] TN942