ZnO/SnO_2气体传感器的喷墨打印制备及其性能研究  

Preparation and Properties of Inkjet–printed ZnO/SnO_2 Gas-sensing Films

作　　者：熊丹[1] 沈文锋[2] 黄琦金[2] 庄福强[1] 谭瑞琴[1] 

机构地区：[1]宁波大学,浙江宁波315211 [2]中国科学院宁波材料技术与工程研究所,浙江宁波315201

出　　处：《稀有金属材料与工程》2016年第S1期7-11,共5页Rare Metal Materials and Engineering

基　　金：国家自然科学基金(21377063;21205127);宁波大学王宽诚幸福基金

摘　　要：利用以溶胶-凝胶法为主的湿化学法制备了ZnO/SnO_2前驱溶液墨水,并利用喷墨打印功能薄膜技术实现在银钯叉指电极衬底上制备ZnO/SnO_2不同混合比例的金属氧化物气敏薄膜元件。通过XRD,SEM对气敏薄膜进行结构分析和形貌观察。利用气敏检测装置研究了不同复合比例的气敏薄膜元件阻温特性及其对乙醇的气敏特性。实验表明,增加薄膜喷墨打印次数可降低薄膜电阻,喷打5次的薄膜可得到性能较好的连续膜。在工作温度250℃时,Zn/Sn摩尔比例为4:1的复合薄膜对乙醇气体显示出最佳气敏响应。ZnO/SnO_2 ink was prepared by a sol-gel technique. The ZnO/SnO_2 ink with different mixed ratios was printed onto alumina substrate with Ag-Pd electrodes by an ink-jet technology. The structure and morphology were analyzed by XRD, SEM and TEM. The resistance-temperature characteristics and the sensitivity to ethanol gas were tested by gas sensing experiments. The results show that with more times of printing, the resistance decreases. The best performance film is obtained when printed for five times. At operating temperature 250 ℃, laminated film with Zn/Sn molar ratio 4:1 shows the best sensitivity to ethanol.

关 键 词：溶胶-凝胶 喷墨打印 ZnO/SO2 气敏薄膜 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]