2-μm single longitudinal mode GaSb-based laterally coupled distributed feedback laser with regrowth-free shallow-etched gratings by interference lithography  

作　　者：杨成奥 张宇 廖永平 邢军亮 魏思航 张立春 徐应强 倪海桥 牛智川 

机构地区：[1]State Key Laboratory for Superlattices and Microstructures, Institute of Semiconductors, Chinese Academy of Sciences [2]Synergetic Innovation Center of Quantum Information and Quantum Physics, University of Science and Technology of China

出　　处：《Chinese Physics B》2016年第2期181-185,共5页中国物理B（英文版）

基　　金：Project supported by the National Key Basic Research Program of China(Grant Nos.2014CB643903 and 2013CB932904);the National Special Funds for the Development of Major Research Equipment and Instruments,China(Grant No.2012YQ140005);the National Natural Science Foundation of China(Grant Nos.61435012,61274013,61306088,and 61290303);the Strategic Priority Research Program(B)of the Chinese Academy of Sciences(Grant No.XDB01010200)

摘　　要：We report a type-I Ga Sb-based laterally coupled distributed-feedback（LC-DFB） laser with shallow-etched gratings operating a continuous wave at room temperature without re-growth process. Second-order Bragg gratings are fabricated alongside the ridge waveguide by interference lithography. Index-coupled LC-DFB laser with a cavity of 1500 μm achieves single longitudinal mode continuous-wave operation at 20℃ with side mode suppression ratio（SMSR） as high as 24 dB.The maximum single mode continuous-wave output power is about 10 mW at room temperature（uncoated facet）. A low threshold current density of 230 A/cm^2 is achieved with differential quantum efficiency estimated to be 93 mW/A. The laser shows a good wavelength stability against drive current and working temperature.We report a type-I Ga Sb-based laterally coupled distributed-feedback（LC-DFB） laser with shallow-etched gratings operating a continuous wave at room temperature without re-growth process. Second-order Bragg gratings are fabricated alongside the ridge waveguide by interference lithography. Index-coupled LC-DFB laser with a cavity of 1500 μm achieves single longitudinal mode continuous-wave operation at 20℃ with side mode suppression ratio（SMSR） as high as 24 dB.The maximum single mode continuous-wave output power is about 10 mW at room temperature（uncoated facet）. A low threshold current density of 230 A/cm^2 is achieved with differential quantum efficiency estimated to be 93 mW/A. The laser shows a good wavelength stability against drive current and working temperature.

关 键 词：laterally coupled distributed feedback laser LC-DFB interference lithography GASB second-order Bragg grating 

分 类 号：TN305.7[电子电信—物理电子学] TN248