基于微环谐振器的甲烷传感器  

Methane sensor based on micro-ring resonator

作　　者：王文清 王晓璐[2] 田子建[2] 

机构地区：[1]北京市煤炭矿用机电设备技术开发有限公司,北京100042 [2]中国矿业大学(北京)机电与信息工程学院,北京100083

出　　处：《工矿自动化》2016年第2期34-38,共5页Journal Of Mine Automation

基　　金：国家自然科学基金资助项目(U1261125);北京市教育委员会创新团队建设提升计划资助项目(IDHT20130511)

摘　　要：提出了一种新型的基于微环谐振器的甲烷传感器。该传感器通过微环表层的穴番A涂层来增加微环的有效折射率,使微环谐振器中谐振波长随甲烷浓度的增加而向右漂移;通过测量输出光信号的谐振波长推算出甲烷浓度。理论分析结果表明,该传感器的谐振波长变化范围在一个自由光谱范围内,甲烷浓度测量范围为0~15%;对比SOI材料和聚合物材料、单面敏感膜和三面敏感膜的测量结果,得出聚合物材料三面敏感膜微环的谐振波长变化幅度较大,测量灵敏度为60pm。A new type of methane sensor was proposed which was based on micro-ring resonator.The sensor is coated cryptophane A on micro-ring surface to increase effective refractive index of the microring,so as to make resonance wave length in the micro-ring resonator drift towards the right along with methane concentration increasing.Methane concentration is gotten by measuring the outputted resonance wave length.The theoretical analysis results show that change of the outputted resonance wave length of the sensor is within a free spectral range,and methane concentration measuring range is 0~15%.By comparing measurement results of SOI material and polymer material,single sensitive film and three sensitive films,a conclusion is gotten that polymeric material micro-ring with three sensitive films has larger variation width of resonance wave length,which has measurement sensitivity of 60 pm.

关 键 词：甲烷传感器 甲烷浓度测量 微环谐振器 敏感膜 

分 类 号：TD712.55[矿业工程—矿井通风与安全]