基于MEMS的红外动态图像生成技术  

Infrared dynamic scenes generating technique based on MEMS

作　　者：施蕊[1] 徐畅[1] 徐锐[1] 石诺[1] 杨扬[1] 钱丽勋[1] 王欣[1] 李卓[1] 

机构地区：[1]北京理工大学光电学院,北京100081

出　　处：《红外与激光工程》2016年第2期59-63,共5页Infrared and Laser Engineering

摘　　要：提出了一种基于MEMS技术的红外动态图像生成技术。利用热传导方程，建立了可见光，红外图像转换膜的理论模型；介绍了可见光／红外图像转换膜制作的工艺流程，制作了一张像元数为512×512、像元尺寸为35μm的可见光／红外图像转换膜。并利用转换膜构造了红外动态图像生成装置，通过实验对红外动态图像生成装置的性能进行了研究。利用MEMS技术制作的可见光／红外图像转换膜可以工作在红外3～5μm和8—12μm两个波段。根据实验测得红外图像生成装置的空间分辨率为14lp／mm，在3—5μm波段，所生成红外图像的温度范围为250—440K，在8～12μm波段，所生成红外图像的温度范围为250—400K。A technique of dynamic IR scene generation based on MEMS was presented. The theoretical model of IR scenes display film based on visible/infrared image film transducer was established. The MEMS technological processes of fabricating the film were introduced. The film with 512×512 pixels was produced, and the pixel size of the film was 35 μm. Based on the IR scene generation film an IR dynamic scene generator was built. The performances of the IR dynamic scene generator were studied experimentally. The IR scenes display film based on visible/infrared image film transducer can be used in two wave bands from 3 μm to 5 μm and 8 μm to 12 μm. The spatial resolution of the IR dynamic scene generator is 14 lp/mm. In the wave band from 3 μm to 5 μm, the equivalent blackbody temperature can be from 250 K to 440 K, and in the wave band from 8 μm to 12 μm, the equivalent blackbody temperature can be from 250 K to 400 K.

关 键 词：红外动态图像生成 微机电系统 可见光/红外图像转换膜 仿真 

分 类 号：TN216[电子电信—物理电子学]