微纳甲烷传感技术的研究  

Research of mico/nano methane sensing technology

作　　者：丁恩杰[1,2] 马洪宇[1,2] 

机构地区：[1]中国矿业大学物联网(感知矿山)研究中心,江苏徐州221008 [2]中国矿业大学感知矿山国家地方联合工程实验室,江苏徐州221008

出　　处：《工矿自动化》2016年第3期16-20,共5页Journal Of Mine Automation

基　　金："十二五"国家科技支撑计划资助项目(2012BAH12B01)

摘　　要：针对矿山物联网发展对甲烷传感器低功耗、微型化、低成本的设计要求,对一种基于微纳米技术的载体催化燃烧式甲烷传感器展开研究,着重介绍了该种甲烷传感器的微加热器及低维甲烷传感方面的研究现状及相应成果,并介绍了一种新型金属-绝缘体-金属结构的金属氧化物半导体甲烷传感器。该种甲烷传感器具有功耗低、体积小等特点,符合矿山物联网的发展需求。For design requests of low power consumption, miniaturization and low cost about methane sensor because of development of mine Internet of things, a carrier catalytic combustion type methane sensor based on mico/namo meter technology was researched. Existing research status and corresponding achievements of the methane sensor were introduced in details on inspects of microheaters and low- dimensional methane sensing, and a metal oxide semiconductor methane sensor with a new metal-insulator- metal structure was introduced. The methane sensor has characteristics of low power consumption and miniaturization, which meets with development requests of mine Internet of things.

关 键 词：甲烷传感器 微纳米技术 微加热器 

分 类 号：TD672[矿业工程—矿山机电]