滤波正弦相位调制干涉测量技术误差分析  

Error Analysis of Sinusoidal Phase Modulating Interferometry Technique Base on Filter Wave

作　　者：杨文韬[1,2,3] 王立威[1,2] 梁一平[3] 肖立勇[1,2] 韩文娟[1,2] 

机构地区：[1]六盘水师范学院物理与电子科学系,贵州六盘水553004 [2]六盘水光机电工程中心,贵州六盘水553004 [3]重庆师范大学物理与电子工程学院,重庆401331

出　　处：《重庆师范大学学报（自然科学版）》2016年第2期159-165,共7页Journal of Chongqing Normal University:Natural Science

基　　金：贵州省科技厅联合基金项目(No.黔科合LH字[2014]7456);贵州省教育厅重点项目(No.2013174);贵州省高校优秀科技创新人才支持计划项目(No.黔教合KY字[2013]146)

摘　　要：基于正弦相位调制干涉测量是当前国际前沿的高精度光学测量技术,在位移、形貌等测量中得到广泛应用。通常采用傅里叶变换进行频谱分析提取相位参数,测量中需要处理庞大的数据,测量仪器难以快速获得测量结果,严重限制了正弦相位调制干涉的使用范围。为了降低传统频谱分析处理信号的复杂性,采用了滤波技术处理相位信息。在数据处理时直接采用低通滤波器滤除高次谐波成分,通过误差分析可知运用滤波技术处理干涉信号,公式本身引起的误差非常小,最大仅为0.9%;当调制频率波动为0.01Hz时,位移误差最大为0.1nm,误差可以忽略不计。The measurement technology based on sinusoidal phase-modulating interferometry is a forward measuring optical tech- nique in the world. It is widely used in the shift measurement and shape measurement. Generally, Fourier transform is presented to the spectral analysis and extracting phase information. However, since a large amount of data are needed to handle and acquiring the measure result quickly is difficult in measure, it is seriously confined the usable range of Sinusoidal Phase Modulating Interferometry Technique. To reduce the complexity of traditional technology, lower-filter is applied to shelve the higher harmonic wave in data processing. We can see that the error is very small with the Technique of Filter Wave. The greatest inaccuracy from the formula it- self is under 0.9M. When the modulate frequency is 0.01 Hz, the maximal error of shift measurement is about 0. lnm, which can be ignored.

关 键 词：测量 正弦相位调制 滤波 干涉 误差 

分 类 号：TN249[电子电信—物理电子学] TH744.3[机械工程—光学工程]