PVD法制备的(Ti,Al)N硬质膜热稳定性研究  

Thermal Stability of Physical Vapor Deposited(Ti,Al)N Hard Coatings

作　　者：吴化[1] 李欣红[1] 郭明阳[1] 尤申申 

机构地区：[1]长春工业大学先进结构材料省部共建教育部重点实验室,长春130012

出　　处：《真空科学与技术学报》2016年第2期130-135,共6页Chinese Journal of Vacuum Science and Technology

基　　金：长春市科技支撑计划项目(项目号11KZ46)

摘　　要：采用空心阴极离子束辅助多弧离子镀技术在高速钢表面沉积(Ti,Al)N硬质膜,并将其分别在空气和保护气氛中、不同温度下加热,研究膜层的热稳定性。利用X射线衍射和差热分析方法确定了相组成及其变化;观察和检测了膜的表面形貌、粗糙度和纳米压痕硬度。结果表明,膜表面粗糙度0.2190,硬度值34.19 GPa,经空气中700℃加热后,膜层中TiN相开始分解生成TiO_2,当温度升至900℃时膜分解开裂,硬度值降至12.27 GPa,失去保护作用。而在保护气氛下,膜层经1200℃高温加热后与未加热膜相比较,物相组成与表面形貌稍有变化,硬度值降为28.23 GPa。显示出(Ti,Al)N膜具有良好的热稳定性。The thermal stability of the（Ti,Al）N hard coatings,synthesized by multi-arc ion plating assisted with a hollow cathode（HCD） electron beam on substrate of high speed steel.The influence of the heating temperature,atmospheres of air and argon,on the microstructures,phase-structures and mechanical properties of the（Ti,Al）N coatings was investigated with X-ray diffraction,differential scanning calorimeter（DSC）,and conventional mechanical probes.The results show that the heating temperature and type of atmosphere strongly affect the thermal stability of the coatings.For example,annealing in air at 700℃ resulted in decomposition of TiN into TiO2.Heated at 900℃,,the roughened coatings cracked,coinciding with serious decomposition and oxidation of both the coating and the substrate.Moreover,the hardness decreased from the original 34.19 to 12.27 GPa.However,heating at1200℃ in argon reduced the hardness to 28.23 GPa but weakly affected the surface microstructures and phasestructures.

关 键 词：离子束辅助沉积 (Ti Al)N硬质膜 差热分析 热稳定性 

分 类 号：TG[金属学及工艺]