环形静电排斥旋转驱动器微光机电系统微镜  

Micro-opto-electro-mechanical systems mirror based on electrostatic repulsive circular rotation actuator

作　　者：马文英[1] 魏耀华[1] 汪为民[2] 王强[2] 

机构地区：[1]成都信息工程大学通信工程学院,成都610225 [2]中国科学院光电技术研究所微细加工光学技术国家重点实验室,成都610209

出　　处：《强激光与粒子束》2016年第6期29-33,共5页High Power Laser and Particle Beams

基　　金：国家自然科学基金项目(11403029);中国科学院青年创新促进会资助项目(2014346);四川省科技创新苗子工程资助项目(2015064);成都信息工程大学科研基金项目(J201505)

摘　　要：微光机电系统(MOEMS)微镜在激光显示、光束扫描、自适应光学等领域都有重要应用。现有的MOEMS微镜驱动器一般为静电吸引型,难以克服其吸合效应造成的各种问题,同时,方形的驱动器难以与圆形的镜面形成良好匹配,填充比较低。提出了一种环形静电排斥驱动器的MOEMS微镜,该静电排斥驱动器以环形排列,并围绕在镜面的周围,达到了与圆形镜面的良好匹配。所设计的微镜口径为204μm,并利用PolyMUMPS表面工艺进行加工。模拟仿真及实验测试结果显示,该微镜具有0.62°的最大旋转角,494μs的响应时间和1.191kHz的工作带宽,适用于一般光束扫描等的应用需求。The micro opto electro mechanical systems （MOEMS） mirror is an important optical device in laser display,light beam scanning, and adaptive optics applications. MOEMS mirrors are mostly attractive electrostatically actuated in the reported literatures, which are troubled by the pull in effect. Additionally, the mismatch of square actuators and circular mirror willmake the fill factor much lower. A MOEMS mirror based on electrostatic repulsive circular actuator and surface fabricationprocess is proposed in this paper. Arranged like a ring around, the actuator matches well with the circular mirror. The designedMOEMS mirror has an aperture of 204 tzm, and is fabricated by polycrystalline silicon multi users MEMS processes （PolyMUMPs） process. Simulation and experimental results show that the mirror has a maximum rotation angle of 0.62°, a responsetime of 494 tzs and an operation bandwidth of 1. 191 kHz, and is suitable for the common beam scanning applications.

关 键 词：微光机电系统 微镜 表面工艺 静电排斥 环形驱动器 旋转角 

分 类 号：TP211.6[自动化与计算机技术—检测技术与自动化装置]