一种气压传感器新型标定补偿方法（英文）  

A calibration and compensation method for piezoresistive atmosphere pressure sensor

作　　者：杜利东[1] 周晓宇[2] 卫克晶[2] 赵湛[1] 方震[1] 孙学金[2] 

机构地区：[1]中国科学院电子学研究所,北京100190 [2]解放军理工大学气象海洋学院,南京210007

出　　处：《强激光与粒子束》2016年第6期73-77,共5页High Power Laser and Particle Beams

基　　金：supported by National Natural Science Foundation of China(51305423)

摘　　要：通常气压传感器的标定补偿方法复杂耗时,开发了一种新的方法去简化气压传感器的标定补偿。首先,设计恒温结构,并通过PID算法自动调节,使气压传感器的核心敏感元件工作于某一个固定温度(此温度稍高于气压传感器需要工作的最高温度点);其次,把气压传感器在与这个固定温度点相等的环境温度下进行标定;最后,完成标定后不管环境温度如何变化,气压传感器敏感元件始终工作在一个恒定的温度,因此气压传感器的标定与补偿可以得到简化。经测试,气压传感器在一定的环境温度范围内实现恒温工作,标定后可以以较高的精度测量气压,实验结果表明经过标定补偿后的气压传感器可以在实际中应用。In this paper, we present a simplified calibration and compensation method that enables the piezoresistive pressure sensor to function with high resolution in wide range of ambient temperature. Normally,extensive work in calibration and compensation of atmosphere piezoresistive pressure sensors is always requested. In order to simplify the calibration and compensation method, the sensor＇s structure is studied through incorporating heating resistors with a MEMS chip. It was placed on a PCB board with heating resistors. TheMEMS chip was kept at a constant temperature state by dynamically modulating the on-and-off time of the heating resistors with a PID algorithm in MCU. After the calibration the constant temperature will not vary with thevariation of ambient temperature, which enables the sensor to function in a wide range of ambient temperature.The results suggest that the designed sensor is agood choice for measurement of atmosphere pressure.

关 键 词：MEMS 气压 传感器 恒温 

分 类 号：TN242[电子电信—物理电子学]