基于PVDF的柔性压力传感器阵列的制备及仿真研究  

Preparation and simulation for flexible pressure sensor array based on poly(vinylidene fluoride) film

作　　者：卢凯[1] 黄文[1] 刘思祎 李响[1] 林媛[1] 冯雪[2] 

机构地区：[1]电子科技大学电子薄膜与集成器件国家重点实验室,四川成都610054 [2]清华大学工程力学系,北京110084

出　　处：《电子元件与材料》2016年第3期40-43,共4页Electronic Components And Materials

基　　金：北京邮电大学开放课题基金资助(No.IPOC2013B006);中央高校基本科研业务费专项资金资助(No.ZYGX2013J040);国家重点基础研究发展计划(973计划)资助(No.2015CB351905)

摘　　要：采用湿法刻蚀制备了基于PVDF薄膜的柔性4×4压力传感器阵列,该传感器具有16个毫米尺寸的电容器单元。使用光学显微镜、原子力显微镜观测了传感器表面形貌,显示电极阵列的界面清晰,PVDF薄膜表面形貌平整。力电耦合效应测试的结果显示传感器的应力输入和电压输出具备高的信噪比和良好的线性关系,力电响应为12×10–3 V/kPa。受力-空载响应输出显示,对传感器施加20~80 kPa范围的脉冲压力,得到了输出0.26~0.98 V的电压信号,并且放电时间少于2.5 ms。结合仿真计算研究了传感器阵列之间的电势信号影响,结果表明相邻阵列单元间的信号干扰随着阵列所受压力增加而增加并且呈现线性关系,干扰信号为0.028×10^(–3) V/kPa,在1.4 mm^2尺寸时,低于178 kPa压力所产生的干扰信号可以近似忽略。Flexible 4×4 sensor array with 16 capacitor units in micro scale was fabricated by etching based on a piezoelectric PVDF film. The morphology of the sensor array was studied by an optical microscope and atomic force microscope, the results show that the sensor array based on PVDF film has a smooth surface with a clear interface of electrodes. Electro-mechanical properties of the sensor were examined as well, the results show a high signal to noise ratio and good linear property of 12×10–3 V /kPa. The hold-and-release output response of the sensor was obtained by applying impulse pressures which indicated that the sensor array could generate 0.26-0.98 V voltage signals in less than 2.5 milliseconds under the applied pressure range of 20-80 kPa. Combining simulation, the potential signal impact of the adjacent units was studied. The results show that the signal interference between the array units increases with the pressure on the sensor, which shows a linear relationship with the interference signal of 0.028×10–3 V/kPa. The generated signal interference could be ignored within the pressure of 178 kPa at the unit size of 1.4 mm^2.

关 键 词：PVDF薄膜 刻蚀 柔性 传感器 阵列 仿真 

分 类 号：TB381[一般工业技术—材料科学与工程]