异型加热器在直拉硅单晶炉中的应用  

Application of Irregular Heater in CZ Silicon Crystal Furnace

作　　者：吕菲[1] 耿博耘[1] 

机构地区：[1]中国电子科技集团公司第四十六研究所,天津300220

出　　处：《中国电子科学研究院学报》2015年第6期646-651,共6页Journal of China Academy of Electronics and Information Technology

摘　　要：本文在直拉炉中使用异型加热器来替代普通加热器,通过有限元分析软件模拟分析,指出异型加热器增大了固液界面温度梯度,拉平了固液界面形状,同时也导致应力增大。单晶拉晶实验对比结果显示,使用异型加热器等径功率显著降低,拉晶速度明显提高,并且功率与拉晶速率变化幅度变小,有利于等径状态的稳定化。In this paper,a irregular heater was used in CZ crystal furnace instead of a general heater.The analysis of finite element simulation analysis software indicated that irregular heater could increase the temperature gradient of solid-liquid interface,level the solid-liquid interface shape,but also led to the increasing of stresses.The contrast experimental results of single crystal growth showed that during body growth,the power reduced significantly,the pulling speed improved obviously,moreover,the change ranges of the power and the pulling speed became small by using the irregular heater,which benefited stabilizing the body growth.

关 键 词：异型加热器 数值模拟 对比性实验 

分 类 号：TN304[电子电信—物理电子学]