低刚度石英加速度计摆片加工工艺  

Low-rigidity quartz accelerometer's chip machining technology

作　　者：于洪宇[1] 朱学毅[1] 李立勇[1] 杨稳[1] 

机构地区：[1]天津航海仪器研究所,天津300131

出　　处：《物探与化探》2015年第B12期44-46,共3页Geophysical and Geochemical Exploration

基　　金：国家高技术研究发展计划("863"计划)项目(2011AA060501)

摘　　要：针对高精度石英挠性加速度计对石英摆片性能改进的需求,梳理出在加工制造过程中应克服的工艺难点,对其中的研磨、刻蚀、激光切割、镀膜四个关键工序开展研究,提出各工序具体的工艺实现及采取的工艺措施,最终概括了各工序工艺要领,提出工序融合,互相兼顾的工艺思想。On the basis of introducing the performance requirement that is to be reached in the low-rigidity Quartz Flex Accelerometer’s Chip machining,the technical difficulties in machining are brought forward,the polished dressing,etching process,laser cutting and chip coating are analyzed in depth,and the detailed technical realization and corresponding measures are also presented. At last,the main technical points in the working procedure are summarized. The idea of syncretizing the working procedure is also brought forward.The stability is established for the high- performance low- rigidity quartz accelerometer’s chip machining.

关 键 词：低刚度 摆片加工 研磨 刻蚀 镀膜 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置] TG580[自动化与计算机技术—控制科学与工程]