利用纳秒激光提高铜表面吸光率的研究  

Research on Light Absorption Enhancement of Copper by Nanosecond Laser

作　　者：任乃飞[1] 林康[1,2] 张志研[2] 梁浩[2] 高文焱[2] 王奕博[2] 林学春[2] 

机构地区：[1]江苏大学机械工程学院,江苏镇江212013 [2]中国科学院半导体研究所全固态光源实验室,北京100083

出　　处：《中国激光》2016年第3期52-59,共8页Chinese Journal of Lasers

基　　金：国家863计划(2014AA032607);江苏省高校自然科学研究项目(11KJA460003)

摘　　要：利用纳秒脉冲激光对铜表面进行打黑处理，并使用分光光度计、光学表面轮廓仪、扫描电子显微镜（SEM）等对试样进行反射率、粗糙程度的测量以及微观结构的观察。选用单向填充式扫描方式研究了不同扫描间距对打黑效果的影响，发现在不同扫描间距条件下，打黑后会形成不同的微观结构（光栅状、近似光栅状、珊瑚状等），且减小扫描间距可以显著增加吸光率。其中，当扫描间距为10 μm 时，打黑后的样品在200～760 nm 波段的吸光率可达97%以上，在760～1110 nm 波段达到90%以上，而在1110～2500 nm 波段也保持在85%以上。此外，研究了二次填充对打黑效果的影响，发现打黑后样品的吸光率也较第一次打黑有一定提高，且不同填充方向的二次打黑所造成的吸光率的差异随着扫描间距的减小而逐渐减小。Nanosecond pulsed laser is used to blacken the surface of copper, and the reflectance and roughness of the samples are measured by a spectrophotometer and an optical surface profiler. The micro-nanostructure is observed by a scanning electron microscope （SEM）, and the effect of scanning distance on blackening under unidirectional filling scan is investigated. The results show that different micro-nanostructures are formed after different scanning distances （grating-like, approximately grating-like, and coral-like, and so on）, and the decrease of scanning distance can enhance light absorption obviously. When the scanning distance is 10 μm, the absorption of blackened area is over 97% in the wavelength band ranged from 200 nm to 760 nm, over 90% ranged from 760 nm to 1110 nm, and over 85% ranged from 1110 nm to 2500 nm. In addition, the effect of different filling directions at the second time under different scanning distances is also investigated. A certain enhanced absorption value is found after the second blackening compared to the first time, and the difference in absorption among different filling directions is diminished with the decrease in scanning distance.

关 键 词：激光光学 微纳米结构 铜 吸光率 纳秒激光 

分 类 号：TG146[一般工业技术—材料科学与工程] TN249[金属学及工艺—金属材料]