超声波辅助飞秒激光加工光纤材料的工艺探索  

Exploration on Ultrasonic Vibration Aided Femtosecond Laser Machining Process of Fiber Optic Materials

作　　者：刘斌[1] 戴玉堂[1] 殷广林 李涛[1] 

机构地区：[1]武汉理工大学光纤传感技术国家工程实验室,湖北武汉430070

出　　处：《中国激光》2016年第3期60-65,共6页Chinese Journal of Lasers

基　　金：国家自然科学基金(51175393;61475121);湖北省自然科学基金(2014CFB260)

摘　　要：为了研究超声振动对飞秒激光微加工的影响,设计超声辅助装置,进行石英光纤材料的微结构加工试验。探讨不同功率的超声振动对材料加工表面质量及孔深的影响,明确超声辅助飞秒激光加工的作用机理。引入超声振动后,光纤侧面烧蚀的矩形槽壁面更为平整,残留碎屑明显减少,槽或孔的深度有所增加;在超声功率为30 W时,孔的锥度由7.34°减小到4.17°。结果表明,超声振动能有效改善材料加工表面质量,增加加工孔的深度,提高飞秒激光的加工效率,证明超声振动对飞秒激光加工具有明显的改善作用。To study the effects of the ultrasonic vibration on femtosecond laser micromachining, an ultrasonic aided device is designed, and the laser micromachining experiments of fiber optic materials are carried out. The effects of the ultrasonic vibration with different powers on surface quality and the drilling depth are investigated. And the mechanism of the ultrasonic vibration aided laser machining is analyzed. After introducing the ultrasonic vibration, the inner surface of the ablated trench is cleaner, the residue debris on surface is significantly reduced, and the drilling depth is increased. When the ultrasonic power is 30 W, the taper of the hole is reduced from 7.34~ to 4.17~. The results show that, ultrasonic vibrations can effectively improve the surface quality of materials, increase the depth of the drilled hole, improve the efficiency of the femtosecond laser processing. It is also confirmed that, the ultrasonic vibration has significant effect on improving femtosecond laser processing performance.

关 键 词：激光光学 飞秒激光 微加工 超声振动辅助 表面质量 

分 类 号：TN249[电子电信—物理电子学]