曝光台校正透镜修正效果的检测  

Evaluation of Lens Correction in Exposal Flat

作　　者：李刚[1] 汪健如[1] 应根裕[1] 

机构地区：[1]清华大学电子工程系,北京100084

出　　处：《真空科学与技术》2002年第4期255-259,共5页Vacuum Science and Technology

摘　　要：检验曝光台校正透镜的修正效果 ,通常是通过在生产线上实际制管来进行。这种方法费时费力 ,并且存在各制作工序误差的积累。本文研制了一种装置 ,通过检测透镜修正前后光落点在荧光屏内表面的落点位移 ,直接检测修正效果 ,并且测量精度能达到 3～ 5 μm。A novel technique was successfully developed to evaluate the lens correciton in the exposure flat, in which the displacement of the light spots on the inner surface of the screen before and after the lens correction is used to evaluate the results of the correction. The accuracy can be as good as 3-5 μm. In contrast, the conventional way of the evaluation by trial-and-error in production lines is time consuming and costly. Moreover, it results in accumulation of working procedure errors.

关 键 词：曝光台 校正透镜 修正效果 检测 落点位移 光斑图像 荫罩式彩色显像管 制备 光学曝光 

分 类 号：TN141.32[电子电信—物理电子学]