基于纳米化聚酰亚胺材料的MEMS湿度传感器的研究  

MEMS Humidity Sensor Based on Nano-modified Polyimide

作　　者：雷程[1,2] 唐力程 毛海央[2,3] 王岩[2,3] 王玲[4] 胡建东[4] 欧文[2,3] 熊继军[1] 

机构地区：[1]中北大学,电子测试技术国防科技重点实验室,山西太原030051 [2]中国科学院微电子研究所智能感知研发中心,北京100029 [3]江苏物联网研究发展中心,智能集成传感器中心,江苏无锡214135 [4]河南农业大学机电工程学院,河南郑州450000

出　　处：《仪表技术与传感器》2016年第1期7-8,36,共3页Instrument Technique and Sensor

基　　金：国家自然科学基金资助项目(61401458,61335008,6136006,51205373);江苏省自然科学基金资助项目(BK20131098);河南省科技开放合作项目(132106000073)

摘　　要：针对现有的MEMS湿度传感器制备工艺复杂、灵敏度较低等问题,文中报道了一种基于纳米化聚酰亚胺材料的MEMS湿度传感器,该器件的感湿材料是利用等离子技术对聚酰亚胺进行表面修饰制备的,该方法简单且与CMOS工艺兼容。同时文中对同样结构基于亚胺化聚酰亚胺材料和纳米化聚酰亚胺材料的两种器件在不同湿度条件下的电容响应特性进行了测试,测试结果表明,在相对湿度50%~80%范围内,基于纳米化聚酰亚胺材料的器件灵敏度高于同样结构基于亚胺化聚酰亚胺材料器件约50%。Aiming at the problem that the existing MEMS humidity sensor has complex fabrication technique and low sensitivity,a MEMS humidity sensor based nano-modified polyimide which is fabricated by a plasma- striping technique was reported in this paper. The wet material was surface decorated using plasma technology,which is compatible with CMOS. Two kinds of devices made of the material of amination polyimide and nano-modified polyimide were capacitance response characteristic were tested in different humidity conditions. In a relative humidity range of 50% ~ 80%,the sensitivity of the nano-modified-PI-based devices is50% larger than that of imidization-PI-based sensors.

关 键 词：湿度传感器 灵敏度 聚酰亚胺 纳米化 等离子体技术 亚胺化 

分 类 号：TH89[机械工程—仪器科学与技术]