直线超声波电动机在精密平台中应用的现状  

Present Situation of the Linear Ultrasonic Motor Application in the Precision Stage

作　　者：孙向磊 郭丽娜 吕宏伟 

机构地区：[1]航天动力技术研究院西安航天化学动力厂,西安710025

出　　处：《微特电机》2016年第4期71-74,共4页Small & Special Electrical Machines

摘　　要：尖端工业生产领域需要精密平台为其提供技术支持。对各国的先进直线超声波电动机驱动的精密平台的原理、性能和应用作了初步介绍,并与上海大学研制的短、小、薄超声波电动机精密平台作对比。通过分析它们的特点,为我国的直线超声波电动机驱动控制精密平台的开发研究提供建议和参考。The precision stage provides the technical support for the sophisticated industry field. This paper makes theinitial introduction on principles, properties and application of precision stages driven by the linear ultrasonic motor, andmakes the contrast with the short, small and thin linear ultrasonic motor precision stage of Shanghai University. Through analyzing their characteristics, this paper provides reference for research and development of the linear ultrasonic motor precision stages in our county.

关 键 词：精密平台 直线超声波电动机 定位精度 

分 类 号：TM359.9[电气工程—电机]