微摩擦测试仪力传感器的研究  

Research on force sensors in a micro-friction test rig

作　　者：黎海文[1] 贾宏光[1] 吴一辉[1] 李锋[1] 

机构地区：[1]中国科学院长春光学精密机械与物理研究所,吉林长春130022

出　　处：《光学精密工程》2002年第4期388-391,共4页Optics and Precision Engineering

摘　　要：讨论了微尺度构件的摩擦力测试问题。Bhushan和Koinkar分别对硅材料的宏观摩擦系数和纳米摩擦系数进行了对比实验 ,实验表明纳米摩擦系数远远低于宏观摩擦系数。而在微机械构件中 ,零件的大小一般为微米级 ,甚至更大 ,接触面积也较大。载荷介于宏观和微观之间 ,有时会大于nN范围 ,因此其摩擦特殊 ,有可能不完全等同于宏观摩擦和纳米摩擦 ,因此需进一步研究。但现有的微摩擦测试仪器不管是载荷还是测量范围都是基于纳米量级 ,因此需要一种用于研究微机械样品间摩擦的专用仪器。本文主要对这种微摩擦测试仪中关键技术之一力传感器进行了研究。由于普通传感器在测量精度较高时 ,分辨率、灵敏度等均较低 ,不能满足系统的要求。针对普通传感器的不足 ,本文采用微机械工艺加工微力传感器的办法。这是由于微机械工艺采用的技术多是半导体工业的硅表面工艺和体硅加工工艺 ,因此这种传感器可以大批量制造 ,且具有低成本、高精度、低驱动、高可靠性、低功耗、占用空间小、重量轻和响应速度快等优点。In this paper, the problem of friction testing in micro-components is discussed.The experimentation made by Bhushan and Koinkar shows that the coefficients of macro friction and nano friction are different.But in MEMS, the size of the part is several microns,or even greater than that, and the interface area is beyond nano with the load between N and nN. So the MEMS's friction is neither macro friction nor nano one, which should be studied further.But there is no any appropriate instrument to do so because the present instruments are designed for macro or nano friction testing. This paper discusses the force sensor which is used in the instrument for testing the MEMS's friction.The general force sensor's resolving power and sensitivity are too low. And we make the force sensor by MEMS technics,which has many advantages such as low cost,high precision and reliability, low drive and power consume,etc. Finally, the performance of the force sensor is present.

关 键 词：微摩擦测试仪 力传感器 MEMS 结构设计 

分 类 号：TH823[机械工程—仪器科学与技术] TP212[机械工程—精密仪器及机械]