基于Z-力敏元件的测力研究  

Research on Testing Force Based on Z-Sensitive Element

作　　者：江东[1] 单薏[1] 刘绪坤[1] 杨嘉祥[1] 王德玉[1] 

机构地区：[1]哈尔滨理工大学电气与电子工程学院,哈尔滨150080

出　　处：《传感技术学报》2016年第2期182-187,共6页Chinese Journal of Sensors and Actuators

基　　金：国家自然科学基金项目(51377037)

摘　　要：Z-力敏元件是一种新型的半导体器件,输出为与压力应变有一定对应关系的频率量,该器件具有分散性、非线性、温度特性、零点漂移等特性,须通过硬件或补偿软件才能实际应用。本文对Z-力敏元件的特性进行了研究,通过三次样条插值方法实现力敏元件的线性化,通过二次插值方法实现温度补偿,通过加载时重量突变编程锁定的方法解决零点漂移。实验表明,通过数字化补偿后Z-力敏元件可输出与被测压力应变成正比的线性输出,该研究为Z-力敏元件的实际应用奠定了基础。Since Z-sensitive element is a semiconductor element that exists dispersion,nonlinearity,temperaturecharacteristics,zero drift characteristics,the amount of output frequency are correspondence to strain of the pres-sure,it can be applied only after compensation. The characteristics above of the Z-force-sensitive components wereresearched in this paper. The dispersion and nonlinear of the force-sensitive element is solved by cubic spline inter-polation method. The temperature characteristics exist is solved by quadratic interpolation method. The zero driftcharacteristics are solved by lock method through program. Experiments show that through digitization compensatedZ-force-sensitive components the output frequency of the test system can directly proportional to the measured pres-sure strain. The research results lay a foundation for practical application of Z-force-sensitive element.

关 键 词：压力传感器 非线性补偿 温度补偿 零点漂移 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]