扩散硅压力变送器的温度补偿方法  

Compensation Technology of Diffused Silicon Digital Pressure Transducer

作　　者：孟丹丹 陈兵[2] 秦文[3] 

机构地区：[1]中环天仪股份有限公司,天津300384 [2]天津工业自动化仪表研究所有限公司,天津300060 [3]河北工业大学控制科学与工程学院,天津300130

出　　处：《仪器仪表用户》2016年第4期5-7,34,共4页Instrumentation

基　　金：天津市科技计划项目(13ZCZDGX01700)

摘　　要：扩散硅压力变送器具有精度高、稳定性好、响应速度快等优点,但容易受温度影响,导致零点漂移和灵敏度漂移。因此需对扩散硅压力变送器进行温度补偿。本文提出了一种软件补偿方法,首先建立扩散硅压力变送器与温度的高阶温度补偿模型,工控机利用最小二乘回归算法(PLSR)求出压力变送器的温度补偿系数,通过HART通讯把温度补偿系数发送到压力变送器中,压力变送器通过高阶温度补偿模型就可实现对扩散硅压力变送器的温度补偿。Diffusible silicon pressure transducer has advantages of high measure precision and fast dynamic response. The performances of the transducer can be affected by temperature. it caused the problem of the zero temperature drift and sensitivity drift. So the transducer needs to be compensated by temperature. The soft compensation solution and compensation algorithm are proposed, First establish the temperature compensation model of the diffusible silicon pressure transducer, and the industry computer using least squares regression method（PLSR）to calculates the temperature compensation coefficient, and send the compensation coefficient to the transducer by HART communication, then the temperature compensation of the diffusible silicon pressure transducer is realized by the high order temperature compensation model.

关 键 词：扩散硅压力传感器 温度补偿模型 最小二乘回归法 

分 类 号：TH812[机械工程—仪器科学与技术]