脉冲LD泵浦电光调Q深紫外激光器  

Pulse LD Pumped EO-Q Switched DUV Laser

作　　者：岱钦[1] 史瑞新[2] 崔建丰 李漫[1] 李业秋[1] 乌日娜[1] 姚俊[1] 

机构地区：[1]沈阳理工大学理学院,辽宁沈阳110159 [2]吉林大学口腔医学院,吉林长春130021 [3]鞍山紫玉激光科技有限公司,辽宁鞍山114000

出　　处：《发光学报》2016年第4期463-466,共4页Chinese Journal of Luminescence

基　　金：国家自然科学基金(61378042);辽宁省高校杰出青年学者成长计划(LJQ2015093);辽宁省科技计划(2014220040);沈阳市科技计划(F16-210-6-00);沈阳理工大学激光与光信息辽宁省重点实验室开放基金资助项目

摘　　要：研制了千赫兹213 nm深紫外全固态激光器。激光器采用脉冲LD侧面泵浦方式和电光调Q技术,实现了10瓦级基频光的稳定输出。利用多次倍频技术,实现了稳定的213 nm深紫外激光输出。当LD泵浦电流为80 A时,213 nm激光输出的最大平均功率达到了151 m W,激光器重复频率为1 k Hz,激光脉冲宽度为10ns,功率不稳定度为3%。同时,对激光在非线性晶体中的偏振匹配和不同重复频率条件下的激光器运转特性进行了分析。A k Hz 213 nm DUV solid-state-laser was developed adopting LD side-pumping configuration and electro-optical Q-switched techniques. A fundamental frequency radiation with the output power of 10 W was presented. The laser system could operate stably at the wavelength of 213 nm using multiple frequency techniques. When the pumping current of LD is 80 A,the maximum average output power of 213 nm beam arrives at 151 mW with the repetition rate of 1 kHz,the pulse width of 10 ns,and the power instability of 3%. Then,the polarization matching of the laser beam in the nonlinear crystal was analyzed. Furthermore,the operation properties of the laser system were studied detailedly under different repetition rates.

关 键 词：深紫外 LD脉冲泵浦 全固态激光器 

分 类 号：TN248.1[电子电信—物理电子学]