用于纺织品表面改性的磁控溅射技术研究进展  

Research progress of magnetron sputtering in textiles

作　　者：师艳丽[1,2] 李娜娜[1,2] 付元静 赵秀朕 常哲[1,2] 刘峰[1,2] 封严[1,2] 

机构地区：[1]天津工业大学纺织学院,天津300387 [2]天津工业大学先进纺织复合材料教育部重点实验室,天津300387 [3]天津工业大学理学院,天津300387

出　　处：《纺织学报》2016年第4期165-169,共5页Journal of Textile Research

基　　金：国家自然科学基金项目(13JCQNJC02100);国家重点基础研究发展计划项目(973计划项目2012CB722706);天津市应用基础与前沿技术研究计划项目(IRT13084);长江学者和创新团队发展计划资助项目(51503144)

摘　　要：磁控溅射作为一种低温高速溅射技术,是新型的纺织品表面改性方法。介绍了纺织品表面镀膜的常用方法,概括了磁控溅射的基本原理,综述了应用磁控溅射技术制备抗菌、导电、电磁屏蔽、抗紫外线、防水透湿等功能纺织品的研究现状,探讨了该技术在纺织品染色过程中的应用,最后对磁控溅射技术用于纺织品研发中存在的问题进行总结。结果表明,利用此方法可在纺织品表面沉积Ag、Cu、Sn、Ni、TiO_2、聚四氟乙烯等不同材料的薄膜,成膜效率高,过程更加环保,且膜层不易开裂。As a kind of sputtering technology with high deposition rate and low substrate temperature,magnetron sputtering provides a new method for the surface modification of textiles. First,the methods of films formed on the textile and the principle of magnetron sputtering are introduced. Then this article reviews the research progress on development of antibacterial,conductive,electromagnetic shielding,UV proof,waterproof and moisture-permeable and other functional fabrics prepared by magnetron sputtering in details and discusses the application of the technology in dyeing process. Finally,the existing problems in the magnetron sputtering process are summarized. Ag,Cu,Sn,Ni,TiO_2,poly（ tetrafluoroethylene）（ PTFE） and other materials can be deposited on the surface of textiles by magnetron sputtering.Compared with other methods,magnetron sputtering is more efficient and environment friendly and the prepared film is not easy to crack.

关 键 词：磁控溅射 功能纺织品 镀膜 染色 

分 类 号：X79[环境科学与工程—环境工程]