不锈钢基压电厚膜俘能器的制作与性能测试  

The Fabrication and Performance Test of Energy Harvester Based on Stainless Steel Substrate and Piezoelectric Thick Film

作　　者：殷小林[1] 董维杰[1,2] 王大志[3] 杨淑[1] 

机构地区：[1]大连理工大学电子科学与技术学院,辽宁大连116023 [2]辽宁省集成电路重点实验室,辽宁大连116023 [3]大连理工大学机械工程学院,辽宁大连116023

出　　处：《压电与声光》2016年第2期203-206,共4页Piezoelectrics & Acoustooptics

基　　金：国家自然科学基金资助项目(61340052)

摘　　要：由于硅基底断裂韧性低及压电厚膜有利于提高俘能器输出功率,因此,该文提出在304不锈钢基底上制备PZT压电厚膜俘能器。304不锈钢薄片既作为基底又作为下电极,金属Pt/Ti结构作为上电极。不锈钢基底厚为30μm,采用电流体驱动雾化沉积制备5μm厚的压电材料,通过对压电材料XRD表征,得到了在(110)晶向择优取向的钙钛矿结构。设计了长20mm、宽5mm压电悬臂梁结构俘能器。实验表明,压电俘能器的谐振频率为81Hz,当加速度为0.69 g(g=9.8m/s2)时,输出开路电压峰-峰值为1.3V;负载电阻为260kΩ时,输出功率最大(为0.758μW),对应的功率密度为3.19mW·cm-3·g-2。As silicon substrate has low fracture toughness,piezoelectric thick film is benefit to improve power output of energy harvester,an energy harvester with 304 stainless steel substrate and PZT thick film was proposed in this paper.The 304 stainless steel sheet was used as the substrate and the bottom electrode,the metal Pt/Ti structure was used as the top electrode.The stainless steel substrate is 30μm in thickness,5μm-thick piezoelectric material was fabricated by electrohydrodynamic atomization deposition,and the excellent（110）crystal orientations perovskite structure was obtained by means of piezoelectric material′s XRD characterizing.The piezoelectric cantilever energy harvester with length of 20 mm and width of 5mm has been designed.The energy harvesting experiment showed the harvester could get 1.3Vopen circuit voltage peak-peak value under the 81 Hz resonance frequency and0.69 g（g=9.8m/s2）acceleration,the maximum output power was 0.758μW at the load resistor of 260kΩ,the power density is 3.19mW·cm-3·g-2.

关 键 词：压电俘能器 雾化沉积 悬臂梁 柔性基底 不锈钢 

分 类 号：TN384[电子电信—物理电子学]