Structure design and simulation of MEMS vibrating ring gyroscope  

环形波动陀螺结构设计与仿真（英文）

作　　者：寇志伟[1,2] 曹慧亮[1,2] 石云波[1,2] 刘俊[1,2] 唐军[1,2] 

机构地区：[1]中北大学电子测试技术重点实验室,山西太原030051 [2]中北大学仪器科学与动态测试教育部重点实验室,山西太原030051

出　　处：《Journal of Measurement Science and Instrumentation》2016年第1期78-83,共6页测试科学与仪器（英文版）

摘　　要：MEMS gyroscope is a new inertial navigation sensor,which can measure the input angular rate of sensitive axis using Coriolis effect.Compared to the conventional gyroscope,it owns many unique advantages.A novel structure of vibrating ring gyroscope is proposed and the finite element model of the oscillator is established based on MEMS technology.Through the modal analysis,the natural frequency and mode shapes of the oscillator are obtained.By analyzing the effects of the structural parameters on the mode shapes and frequency of the harmonic oscillator,the optimal design parameters are got.The frequency difference between the operating mode and the other modes is greater than 1kHz after optimization,which can avoid the frequency coupling of the operating mode and other vibrating modes of the oscillator.The simulation results show that the performance parameters of the ring structure meet the design requirements and have obvious advantages.

关 键 词：MEMS vibrating ring gyroscope inertial sensor angular rate solid wave gyroscope 

分 类 号：TN96[电子电信—信号与信息处理]