ZnO薄膜硅微压电矢量水听器  

ZnO thin film piezoelectric micromachined vector hydrophone

作　　者：李俊红[1] 魏建辉[1] 马军[1] 任伟[1] 刘梦伟[1] 汪承灏[1,2] 

机构地区：[1]中国科学院声学研究所声学微机电系统实验室,北京100190 [2]中国科学院声学研究所声场声信息国家重点实验室,北京100190

出　　处：《声学学报》2016年第3期273-280,共8页Acta Acustica

基　　金：国家自然科学基金(11074274;11174319;11474304)资助

摘　　要：提出了一种基于ZnO压电薄膜的硅微压电矢量水听器,其核心部件是利用微电子机械系统(MEMS)技术制作的悬臂梁结构压电加速度计。由近似解析和有限元分析,得出加速度计的灵敏度和谐振频率,并在此基础上对其进行了优化设计。研制了MEMS压电加速度计,并装配后构成MEMS矢量水听器。测试结果表明:加速度灵敏度在20~1,200 Hz范围内约为0.83 mV/(m/s^2)。经过液柱法测量,在1 kHz时,MEMS矢量水听器等效声压灵敏度为-229.5 dB(ref.1V/μPa),比同类型压阻式MEMS矢量水听器的灵敏度高17 dB以上。A silicon micromachined vector hydrophone based on ZnO thin film has been first developed. The key elements of MEMS piezoelectric vector hydrophone are piezoelectric accelerometers with cantilever beam structures fabricated by microelectromechanical systems （MEMS） technology. The approximate theory and finite element method were adopted in MEMS piezoelectric accelerometer structure analysis, and the influence of materials and structural parameters on accelerometer＇s sensitivity and resonance frequency were obtained. The MEMS piezoelectric accelerometers were fabricated using silicon micromachining process, and MEMS piezoelectric vector hydrophone was assembled successfully. The measured results show that the sensitivity of MEMS piezoelectric accelerometer is flat from 20 Hz to 1200 Hz, and equal to about 0.83 mV/（m/s2）. The equivalent pressure sensitivity at 1 kHz of MEMS piezoelectric vector hydrophone is -229.5 dB （ref. 1 V/μPa）, which is 17 dB higher than that of the same type MEMS piezoresistive vector hydrophone.

关 键 词：矢量水听器 ZnO 压电加速度计 微压 压电薄膜 加速度灵敏度 近似解析 微电子机械系统 压阻式 标准加速度计 

分 类 号：TB565.1[交通运输工程—水声工程]