基于MEMS VOA阵列的红外场景生成器  

IR Scene Generator Based on MEMS VOA Array

作　　者：吕兴东 魏伟伟[1] 张金英[1] 杨晋玲[1] 杨富华[1] 

机构地区：[1]中国科学院半导体研究所,北京100083

出　　处：《航空兵器》2016年第2期38-41,共4页Aero Weaponry

基　　金：航空科学基金项目(20130136001)

摘　　要：针对动态半实物仿真系统的需求,提出了一种新颖的基于微机电系统(MEMS)技术的红外场景生成器。研究了可变光衰减器(VOA)阵列组成红外场景生成器的工作原理和器件结构,提出了新型串联双向折叠梁结构和阵列布局方案,为实现大规模阵列的红外场景生成器奠定基础。A novel IR scene generator based on MEMS technology is proposed for the application of dynamic semi-physical simulation systems. The working principle and device structure of the IR scene generator composed by VOA array are investigated. The novel series of bi-directional folded beam structure and its array distribution solution are proposed. This work provides the foundation for the realization of large-scale array IR scene generator.

关 键 词：微机电系统 可变光衰减器 红外场景生成器 阵列 洛伦兹力 

分 类 号：TN219[电子电信—物理电子学] O439[机械工程—光学工程]