基于LTCC技术的微型FAIMS生化气体传感器制备  

Preparation of Micro FAIMS Biochemical Gas Sensor Based on LTCC Technology

作　　者：王涛龙 梁庭[1] 王心心[1] 张瑞[1] 刘雨涛[1] 熊继军[1] 

机构地区：[1]中北大学,仪器科学与动态测试教育部重点实验室,电子测试技术国防科技重点实验室,山西太原030051

出　　处：《仪表技术与传感器》2016年第3期7-9,37,共4页Instrument Technique and Sensor

基　　金：国家杰出青年科学基金资助项目(51425505)

摘　　要：陶瓷具有稳定的电特性、机械鲁棒性、化学惰性和超强的可塑性,因而得到广泛的应用。采用低温共烧陶瓷(LTCC)工艺技术和新型屏蔽电极的设计实现生化气体传感器的制备。气体传感器采用高场非对称波形离子迁移谱(FAIMS)原理,通过丝网印刷技术来实现迁移电极、屏蔽电极、测试电极等功能器件的安置,并且在气流通路中填入碳膜(印刷碳浆料)有效地防止了层压中气流通路的坍塌,保证了气流通路上下极板的平整,使得所制传感器的功能精度得到了有效的保证,避免了器件间的封装、引线外连,为生化气体传感器的稳定工作奠定基础。Ceramic has been widely applied for its stable electrical properties,mechanical robustness,chemically inert and super plasticity. LTCC technology and new shield electrode design method was used to realize biochemical gas sensor preparation.This sensor was designed based on FAIMS（ high-field asymmetric waveform ion mobility spectrometry） theory. Functional devices such as the migration electrode,shield electrode and test electrode are disposed by screen printing technology. Carbon film was filled（ printed carbon paste） in the cavity to effectively prevent the cavity collapses and to ensure the flow path of the upper and lower plates smooth. The fabricated sensor obtains effective function accuracy,avoids the package between devices and the external leads,laying a stable foundation for biochemical gas sensors.

关 键 词：低温共烧陶瓷 厚膜工艺 高场不对称波形离子迁移谱 气体传感器 离子迁移管 

分 类 号：TN23[电子电信—物理电子学]