光刻技术制备仿生铝超疏水表面的研究  

Preparation of Bionic Aluminum Superhydrophobic Surface by Lithography

作　　者：阮敏[1,2] 王嘉伟[1] 刘巧玲[1] 陈跃[1] 占彦龙 胡良云[2,3] 马福民[1] 于占龙[1] 冯伟[1] 

机构地区：[1]湖北理工学院材料与冶金学院,湖北黄石435003 [2]湖北理工学院矿区环境污染控制与修复湖北省重点实验室,湖北黄石435003 [3]湖北师范学院物理与电子科学学院,湖北黄石435002

出　　处：《湖北理工学院学报》2016年第2期27-32,共6页Journal of Hubei Polytechnic University

基　　金：湖北省教育厅中青年人才项目(项目编号:Q20154402);湖北理工学院创新人才项目(项目编号:15xjz01C);湖北理工学院大学生科技创新项目(项目编号:13cx10);湖北省自然科学基金项目(项目编号:2013CFB041)

摘　　要：超疏水薄膜有很好的自清洁、防腐蚀、减阻和防覆冰性能。利用高速激光雕刻机、光刻机对玻璃片进行刻蚀,并结合溶胶凝胶法制得具有超疏水效果的表面;使用红外光谱仪、扫描电镜、偏光显微镜对表面形貌及结构进行表征。结果表明,先经过高速激光雕刻再使用溶胶凝胶法处理的玻璃片与直接使用溶胶凝胶法处理的玻璃片相比,接触角相当,但经激光雕刻的玻璃片放置2个月后,接触角几乎无变化,表现出更稳定的疏水效果;合适的光刻间距和匀胶厚度能得到较好的微纳米结构。光刻法与溶胶凝胶法结合给铝超疏水表面制备提供一定的思路。Super - hydrophobic film has good performances of self - cleaning, anti - corrosion, drag - reduction and anti - icing. Super - hydrophobic surfaces were obtained by using the high - speed laser engraving ma- chine and lithography to do glass etching and combining sol -gel method to prepare. FTIR, SEM and polari- zing microscope were applied to characterize the morphology and structure of the surfaces. When comparing the surfaces prepared with laser engraving method and sol - gel method to the surfaces prepared with direct sol -gel method,it was found that their contact angle was same, but the former one exhibited more stability than the latter one after the engraved glass was placed for two months. Superior micro - nano structure can be obtained with appropriate lithography space and thickness of the alumina sol. It gives insight into the fabrica- ting of super - hydrophobic surfaces combining the methods of lithography and sol - gel.

关 键 词：超疏水表面 光刻 溶胶凝胶 表面修饰 

分 类 号：TB34[一般工业技术—材料科学与工程]