太赫兹波纹喇叭制造工艺技术实验研究  

Experimental Study on Manufacturing Process Technologies of Terahertz Corrugated Horn Feeder

作　　者：王仁彻[1] 严战非[1] 王向阳[2] 曲宁松[2] 

机构地区：[1]南京电子技术研究所,江苏南京210039 [2]南京航空航天大学机电学院,江苏南京210016

出　　处：《电子机械工程》2016年第2期50-52,56,共4页Electro-Mechanical Engineering

摘　　要：传输太赫兹(Terahertz,THz)波的馈源结构的特征尺寸在亚毫米量级,且精度要求高。波纹喇叭馈源结构具有良好的电讯特性,但内腔结构复杂,制造难度大。针对太赫兹波纹喇叭的具体结构和技术要求,对微细加工和微电铸工艺技术进行了调研和分析,给出了一种利用这些技术的太赫兹波纹喇叭的精密成形工艺方案。开展了内腔筋宽为0.1 mm的波纹结构的工艺实验,为太赫兹波纹喇叭的精密成形提供了有益的工艺方法和工程经验。The feature size of the feeder structure used for transmitting terahertz wave is in sub-millimeter range,and its precision demand is high. The corrugated horn feeder has good communication characteristics,but its intracavity structure is complex and difficult to manufacture. According to the structure and technology requirements of terahertz corrugated horn feeder,surveys and analysis for the technologies of micro-machining and mirco-electroforming are carried out,and a precise forming process scheme for the terahertz feeder using these technologies is proposed. The process experiment is carried out for the corrugated structure whose intracavity rib width is 0. 1 mm. The results provide beneficial process method and engineering experience for precise forming of terahertz corrugated horn feeder.

关 键 词：太赫兹 波纹喇叭馈源 微细加工 微电铸 

分 类 号：TG506[金属学及工艺—金属切削加工及机床]