微型折叠式三维电场传感器  

Micro 3-dimensional folding electric field sensor

作　　者：方奕庚 彭春荣[1] 方东明[1] 王宇[1,2] 夏善红[1] 

机构地区：[1]中国科学院电子学研究所,北京100190 [2]中国科学院大学,北京100049

出　　处：《传感器与微系统》2016年第5期67-69,73,共4页Transducer and Microsystem Technologies

摘　　要：提出一种基于柔性衬底和三维组装方法的新型三维电场传感器。利用柔性衬底的折叠,构建一种互相垂直的新型三维电场传感器,研究了测量空间电场时的耦合,提出解耦算法,标定灵敏度矩阵,实现了空间电场三个方向分量的准确测量;通过一系列的温湿度实验研究了三维结构的形变,证明了三维电场传感器结构稳定可靠。实验结果表明:所研制的三维电场传感器不仅能消除耦合干扰,实现空间电场分量的准确测量,测量误差在3.61%以内;而且通过新的三维组装方法,大大减少了三维电场传感器的质量、体积,折叠工艺简化了三维传感器的组装,有利于批量化生产。A novel 3D electric field sensor which based on flexible substrate and 3D assembling way is presented.Through folding flexible substrate,a novel 3D electric field sensor with orthogonal structure is formed. Coupling while measuring spatial electric field is researched,decoupling algorithm is proposed,and sensitivity matrix is calibrated to realize accurate measurement of X,Y,Z direction components of spatial electric field; through a series of humidity and temperature experiment,research on deformation of 3D structure,prove the structure of 3D electric field sensor is stable and reliable. Experimental results show that the 3D electric field sensor can not only eliminate coupling interference,realize accurate measurement of spatial electric field component,measurement errors is within 3. 61 %,but also greatly reduce folding technology,mass the volume by new 3D assembling way,folding craft simplify assembling of 3D sensor,which is in favor of batch production.

关 键 词：三维电场 三维组装 三维标定 柔性折叠 MEMS电场传感器 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]